ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

dust cap) 12 12 stations P Port R Port NPTF NPTF 14 Accessories Series SYJ3000 How to Order Pilot Valve Ass'y How to Order Connector Ass'y SY114 5 G SY100-30-4ADC : Indicator light and surge voltage suppressor Voltage SY100-30-1A100VAC : 5 6 V S R 1 2 24VDC 12VDC 6VDC 5VDC 3VDC 100VAC50/60Hz 200VAC50/60Hz 110VAC50/60Hz [115VAC50/60Hz] Without indicator light and surge voltage suppressor

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

MVGQ

Enclosure Dustproof Grommet (G)/(H), L plug connector (L), M Plug connector (M) RS Q G Electrical entry RS H A 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC50/60 Hz Standard Stroke RZQ 10% of the rated voltage Allowable voltage (W) (2) (%) Model Standard stroke (mm) 0.5 (With indicator light: 0.55) Power consumption DC MI W S M L MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 0.9

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

LJ1H

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean

MGP

B+stroke E A+stroke MGP MGQ MGG MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) MGC B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 84.5 62.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 9 12.5 112 120 148 162 M6 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) M3 Static load m M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

T

(mm) 6 8 10 12 2.5 I.D.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

P, R port thread type Stations SV 04 4 stations Applicable blanking plate assembly SYJ3000-21-3A (With dust cap) Nil Rc : : 00F G SZ 12 12 stations P port 1/8 1/8 00N NPT R port 00T NPTF SY Applicable solenoid valve Refer to page 1-5-15. Type 32P How to Order SS5YJ332P 07 C4 SYJ A, B port M5 x 0.8, C4 Applicable connector assembly Refer to page 1-5-15.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0802-8 MI-A1202-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MI-A0803-8 MI-A1203-12 MI-A2003-20 MI-A2503-25 MI-A3203-32 MIW-A0804 MIW-A1204 MIW-A2004 MIW-A2504 MIW-A3204 MIW8-PS MIW12-PS MIW20-PS MIW25-PS MIW32-PS MH-G01 (contents quantity 30 g) !4, !5, !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

412 241 161 OUT 563 482 402 322 804 32 12 CE2 207 138 IN 484 415 346 276 691 Weight Standard Stroke ML2B Unit: g Double finger type: MIW C J G5-S (mm) Increase by stroke adjuster Stroke (mm) Weight (g) Increase by scraper Bore size Stroke Model Model CV 8 12 20 25 32 8 mm 3 6 110 8 MIW8-8D 12 mm MVGQ 20 mm 5 10 240 12 MIW12-12D 25 mm 10 30 650 20 MIW20-20D MIW CC 32 mm 20 30 1550 25 MIS25

VQ7-6/7-8

F P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

Sine Cylinder Series REC

22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32 24 21 16 14 22 15 10 13.5 12.5 26.5 50 8 56.2 7 39 12 NA NN P RR S U Z ZZ Bore (mm) 20 M20 x 1.5 30 1/8 9 146 14 217 226 25 M26 x 1.5 34.5 1/8 9 146 14 221 230 32 M26 x 1.5 42.5 1/8 9 159 14 234 243 40 M32 x 2 51 1/4 11 181 18 270 281 Double clevis style: RECD 2 x P (Rc, NPT, G) NN +0.058 0 CDH10 G G H1 Plugged (M5 x 0.8

Sine Cylinder Series REC

22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32 24 21 16 14 22 15 10 13.5 12.5 26.5 50 8 56.2 7 39 12 NA NN P RR S U Z ZZ Bore (mm) 20 M20 x 1.5 30 1/8 9 146 14 217 226 25 M26 x 1.5 34.5 1/8 9 146 14 221 230 32 M26 x 1.5 42.5 1/8 9 159 14 234 243 40 M32 x 2 51 1/4 11 181 18 270 281 Double clevis style: RECD 2 x P (Rc, NPT, G) NN +0.058 0 CDH10 G G H1 Plugged (M5 x 0.8

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] Size Model Stroke range EB G GA OA OB ST WC X 25 LEYG-S025 15 to 100 85 5.4 40.3 M6 x 1.0 12 20 70 54 105 to 300 95 32 LEYG-S032 20 to 100 101 5.4 50.3 M6 x 1.0 12 22 75 64 105 to 300 105 * Two body mounting screws are included with the support block. * The through holes of the LEYG-S032 cannot be used for the top mounting type.

15

M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 12.5 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 12.5 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 4.5 NM2 M4 x 12 2.5 10 12 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M3 x 12 1.5 14 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5 NM2 M4 x 12 2.5 10 12 Included Parts List

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped connector SL-J1A Main transmission line Transmission line 24V 0V Power supply{ 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ Special