VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Round Type Low Pressure Hydraulic Cylinder Series CH
M

36 44 M4 10 10 13 13 10 10 12 12 12 12 12 16 7 7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

P

14.7 19.5 3.8 Deep style (D) ZP10Dl to 40Dl Model Nom.size U02 A 2 B 2.6 C 1.2 D 7 E F 12 Y 0.8 _ _ _ _ ZP02Ul ZP04Ul ZP06Ul ZP08Ul ZP10Ul ZP13Ul ZP16Ul ZP20Ul ZP25Ul ZP32Ul ZP40Ul ZP50Ul U04 4 4.8 1.6 7 12 0.8 U06 6 7 2.5 7 12 0.8 U08 8 9 2.5 7 12 1 U10 10 12 4 13 7.7 12 3 U13 13 15 4 13 7.7 12 3 U16 16 18 4 13 8.2 12.5 3.5 U20 20 23 4 15 9.5 14 4 U25 25 28 4 15 9.5 14 4 U32 32 35 4 15

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Adjusting screw width across flats Lock nut A tightening torque Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Width across flats (mm) 5 5 6 8 8 Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Tightening torque (Nm) 1.2 1.2 2.1 3.4 3.4 5. Do not scratch or gouge the external surface of the cylinder.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Modular Type Lubricators Series AL

How to Order AL800 AL 23 80 12 0 R AL900 Semi-standard R Flow direction: Right Left Body size Port size Semi-standard Lubricator 1 1S-1 1S-2 2 3 6 8 1000 cm3 tank 1000 cm3 tank with switch (Bottom limit ON) 1000 cm3 tank with switch (Bottom limit OFF) Metal bowl With drain cock Nylon bowl (Including sight dome) Metal bowl with level gauge Symbol 12 14 20 4 1 1 1 2 2 1 80 90 1 2 2 1 Thread

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

VP300/500/700

Prefix it to the part nos. of the solenoid valve, etc. 4-8-12 13 3 Port Pilot Operated Poppet Solenoid Valve Rubber Seal Series VP300/500/700 Dimensions: VV3P3 (For N.C.) Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Electric Actuators

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

F

M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

VQ5000

12 stations F 1 to 12 Manifold is 12 stations max.

PA300/500/700

15 0.29 0.23 3.1 3.8 2.9 3.8 12 14 0.36 0.25 VPA742 (Body ported) 0.64 Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Thermo-chiller

(For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

Vacuum Filter AFJ Series

m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate

VQ7-6/7-8

(Bottom side) One-touch fitting 12 (Top side) One-touch fitting 12 (Both sides) Mixed 02D 02U 02B 03D 03U 03B C12D C12U C12B Note) It is not applicable to One-touch fittings.