Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A03 (Side Piping 3/8), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: None, Port Size: B04 (Bottom Piping 1/2), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: N (Indicator Light), Port Size: B06 (Bottom Piping 3/4), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: N (Indicator Light), Port Size: A03 (Side Piping 3/8), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: NM (Indicator Light, Direct Manual Override), Port Size: B04 (Bottom Piping 1/2)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: None, Port Size: A04 (Side Piping 1/2), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: N (Indicator Light)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: None, Port Size: A03 (Side Piping 3/8)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: M (Direct Manual Override), Port Size: A03 (Side Piping 3/8), Thread: T (NPTF), Connector: O (w/o Connector)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: NM (Indicator Light, Direct Manual Override)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: N (Indicator Light)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 1 (100V AC), Option: Z (Indicator Light w/Surge Voltage Suppressor)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A06 (Side Piping 3/4)

PSxx-OMV0003CN

11 12 13 14 15 OUT1 16 OUT2 17 NPN/PNP 18 Line 19 OFF() () -70No.PS-OMV0003CN-G 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -71No.PS-OMV0003CN-G , (1015 ) -72No.PS-OMV0003CN-G ,, (), No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

PSxx-OMV0008CN

11 12 13 14 15 OUT1 16 OUT2 17 NPN/PNP 18 Line 19 OFF() () -74No.PS-OMV0008CN-E 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -75No.PS-OMV0008CN-E , (1015 ) -76No.PS-OMV0008CN-E ,, (), No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

HEC-OM-S008

Host Computer Thermo-con RS-485 RS-485 Symbol Pin No Symbol FG Connector shell FG + 1 + 9 SG 5 FG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No Symbol FG Connector shell FG RD 2 RD SD 3 SD SG 5 SG RS Short CS Figure1-2 Communication Connection (RS-232C) 1-1 HECR Specifications of Communication Method 2 Specifications of Communication Method

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VS7 Note) Plate should be mounted with manifold mounting screws (M1.7 X 20).

PSxx-OMU0008CN

URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1/4 N02LNPT1/4 -81No.PS-OMU0008CN-D