Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

AR20-B to AR60-B

AR20K-B to AR60K-B A-A w A 2 OUT 1 I N C SM A w w Pressure in diaphragm chamber Inlet pressure (IN) Pressure in diaphragm chamber Inlet pressure (IN) r r IN OUT IN (Inlet pressure) OUT (Outlet pressure) q q e e Figure 1 Normal Figure 2 Backflow When the inlet pressure is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 One way roller lever VM1000-4N-02 VM1000-4NU-02 VM1100-4N-02 VM1100-4NU-02 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-02 VM1000-4N-02 T0425 TU0425, T0403,TS0425 Side ported 3 port 2 port VM1100-4NU-02 VM1000-4NU-02 T.T. O.T. P.T.

VDW

G H LVC Stations C37 LVA For 2 stations For 3 stations OUT port size 1 2 Stainless steel LVH Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 LVD VVCW20 6A LVQ Material Pipe material Seal material NBR FKM NBR FKM Symbol Nil A G H LQ C37 Note) Consists of a set for D and U sides.

VCS

Insert a flat head screwdriver into the hook section of the clip groove. q Note) Indicate the valve model no. as a label will be attached to the clip. AZ-T-VCS Valve model no. on page 17-2-42/46 Seal part no. Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

Clean Gas Filter

0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1 2 x TSJ 1/4 Inlet pressure AMG 0.3 MPa Max. flow rate line AFF Pressure drop MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

LEC-OM02704CN

B CCW CW A A 0 B B A A 1 B B 0 1 2 2PA15 PC20 *SNO RS-422USB 11 0 0 31 PC21 *SOP RS-422 RS-422 0h 0 0 RS-422 09600[bps] 119200[bps] 238400[bps] 357600[bps] 4115200[bps] RS-422 RS-422 0 1 800s RS-422 0 1800s PC22 *COP1 C-1 0h 0 0 0 02 14 LE-CSE-2, LE-CSE-5, LE-CSE-A 2 1(A16) 2(A20) 02 14 4 MR-EKCBL30M-L MR-EKCBL30M-H MR-EKCBL40M-H MR-EKCBL50M-H 2 1(A16) 2(A20) 6 24 6 PC23

REC

Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0

Hand Valve Series VH

Models Symbol Model Weight (kg) Body mounted Panel mounted 2 Position Number of positions Piping direction Effective area (mm2) (Cv factor) Series Port Size (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 1 (P) 3 (R) 4 3 (Exhaust center) 7.5(0.4) 0.42 VH211-02 VH201-02 1/4 VH2 Closed center 2 2 (Position) VH212-02 VH202-02 (A) 2 (B) 4 3 1 3 (Closed center) VH300-02, 03 VH310-02, 03 1 (P)

A

Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D

IDG

When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-50), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

w e r t q w e r t i i o o !

-fl Seies

A P B E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

A P B E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

Vacuum Unit

2 p. 31 ZK2 VA A A A K 5 L ZK2 FC A Port for the pressure switch or sensor q w e r t Symbol Port for the pressure switch or sensor Filter case color P With port (type with pressure switch or sensor) Smoke T Without port (type without pressure switch or sensor) Clear q Applicable system w Valve type e Rated voltage A Ejector system K Supply valve: N.C., Release valve: N.C. 5 24 VDC 6 12 VDC

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C