Compact

44 46 49 51 20 67 70 75 79 83 88 92 97 101 105 25 103 110 116 123 130 137 143 150 157 164 Accuracy End deflection (Y direction)*1 0.02 mm End deflection (X direction)*1 0.02 mm Non-rotating accuracy*1 0.05 *1 The values show the end deflection or play of the product without load in the extended condition.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

(27.7) 306 (68.8) 537 (120.7) 42 (9.4) 23 (5.2) Opening/closing stroke (both sides) mm 6 8 8 12 16 4 4 Weight g (oz) 134 (4.7) 345 (12.2) 265 (9.4) 515 (18.2) 952 (33.6) 96 (3.4) 58 (2.0) Note) Values for 16 to 25 are with gripping point L = 20mm, and for 32 to 63 with gripping point L = 30mm.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

52 64 52 61 73 57 60 72 73 81 104 72 80 104 92 100 124 90 98 123 10 26 15.5 1.5 1.4 10 4 2.5 6 4 14 10 15.2 3 5 25.7 19 12 5 4 9.4 17 20.5 16.2 12 27.2 14 8 6 5 14 17 6.5 5.5 18 22 10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.

Compact Cylinder

current CDQS series, 25, 10 mm stroke) CAT.ES20-239C JCQ Series Compact Cylinder JCQ Series Compact (Compared with the current product) [mm] Bore size CDQS JCDQ Weight 29 g 33% weight reduction 23 Weight 43 g 25 12 23 + Stroke 23 25.5 + Stroke 25 24% volume reduction Weight 37 g 35% weight reduction 26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42%

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

KJ10D KJ12D KJ16D KJ20D KJ27D M10 x 1.25 10 43 28 14 20 4 15 M12 x 1.25 12 50 32 16 22 4 17 M16 x 1.5 16 64 42 21 28 4 23 M20 x 1.5 20 77 50 25 33 4 27 M27 x 2 30 110 70 37 51 4 36 83 Series CP96/C96 Simple Specials These changes are dealt with Simple Specials System.

Slider Type/Ball Bushing Bearing

cup Carbon steel 8 36 Shaft Stainless steel Wear ring A Special resin 9 37 Zinc chromated Piston side yoke Rolled steel Wear ring Special resin 10 38 Zinc chromated External slider side yoke Rolled steel Wear ring B Special resin 11 39 Magnet A Cylinder tube gasket NBR 12 40 Magnet B Guide shaft gasket NBR 13 41 Zinc chromated 25 to 40 Piston nut Carbon steel Piston seal NBR 14 42

MY2

Do not allow short circuit of loads. 42 Series MY2 Auto Switch Precautions 3 Be sure to read before handling. Operating Environment Maintenance Warning Warning 1. Never use in an atmosphere of explosive gases. 1. Perform the following maintenance periodically in order to prevent possible danger due to unexpected auto switch malfunction.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 29 29 30 31 32 34 34 35 36 38 42 42 43 43 44 44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order . Specifications. Construction. Dimensions . Made to Order Specification . Related Products . About New air cushion mechanism.

HRX-OM-X084

FLT Operation of this product will stop when the alarm occurs. 5.5 Advanced setting mode HRR Series 5-42 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Communication error alarm detection time 27. Press the [] key. Displays screen for setting the communication error alarm detection time. Time (sec.) to generate alarm AL29: Communication error can be changed.

HRX-OM-W002

MENU Chiller energizing time at alarm accurrence is displayed Alarm occurrence number AL10 123 NO2 ENT Fig 5-4 Key operation (4/4) HRR Series 5.2 Function 5-5 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions 5.3 List of parameters The parameter list of this product is shown below. 5.3.1 Main Menu Table 5.3-1 Main menu parameter list ScreenNo.

HRX-OM-X071

Displays only when the maint / 123 Electric conductivity ( S/cm) RESET DIPV / 1In the case of option Z, Z1, non-display. 2 400V type only 3 Option DM only.

IDU/IDF

IDU3D, 4D, IDF1D to 4D 25 Terminal board W: Water cooled condenser (IDF37C1 to 240D) Model IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D 74 Condenser type Shell & coil system B 247 298 123 123 173 197 A 24 20 47 55 37 45 Model IDU3D IDU4D IDF1D IDF2D IDF3D IDF4D Cooling water flow l/min Note1) 6 8 20 50 65 80 90 A 53 Cooling tower capacity RT Note 2) 2 2 3 5 7.5 7.5 7.5 B Water flow

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

The DIN rail is approximately 30mm longer than the length of manifold. 1.25 L dimensions L=12.5n+10.5 1 6 2 9 3 12 4 15 5 18 6 21 7 24 8 27 9 30 10 33 11 36 12 39 13 42 14 45 15 47 16 50 17 53 18 56 19 59 20 62 Station No. 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 785.5 L DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting

High Vacuum Angle Valve, XL Series

XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air

Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) DB A C C D C D D -X 20 25 32 30.5 36.5 (35) 3.5 4 2.5 (1) 38.5 6.5 40.5 32 38 (36.5) 2 5.5 4 (2.5) 40 8 42 2042.5 48.5 (47) 0.5 7 5.5 (4) 50.5 9.5 52.5 Data As for auto switch mounting

MHS

71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 14 25 42 74 118 187 335 500 750 1270 (1) N 16 28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32

Fieldbus system PROFIBUS DP compatible SI unit

Parameter definition and setting 42 Hardware Configuration 55 GSD file and icon 55 Configuration layout 55 SIEMENS PLC S7TM connection method 56 Parameter setting at PLC 59 I/O Map 61 Diagnostic 62 Accessories 70 -2No.EX-OMN0028-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

MK

625 380 12.5 H 1648 1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical force (N)=Pressure (MPa) X Piston area (cm2) X 100 Operation direction R: Rod side (Clamp) H: Head side (Release) Weight/Mounting Through Hole Unit: g Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 10 20 50 70 100 250 280 500 595 87 123