ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Air Pilot Operated Series NVSA

PB 0103 1 5 Gasket Subplate Buna N AXT 33112-2 18 Screws Pilot Cover (4) AXT 334.1G1 B o E G H K il N 127) 0.63 (161 1.42 {36) 0,91 123) 0.al (15.5) 1.24 (32) 6.10 (155) 2.4e (63) (62) 2.O5 <52) ?.o1 (51) l2B 1.06 1 7 Hold Down 8olls {8.32 x 1 9'61(2) NXT 333,17.5 Mi(tne ln Parenlhess NVSA45l4 DETAIL REF. 0EscRrPTtol{ MATERIAL PAB' NO. 1 Body Alum.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

63) 132.5 Cable length 250 24 Motor cable 65 (3) 15.2 (2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42

53

HED 29 HEA IDH 123 Thermo-chiller connection side 141 Cable Wired remote controller connection side M12/4-core connector (socket side) To use the wired remote controller, the thermo-chiller main unit setting is needed. Use the wired remote controller indoors.

Environment

LEFB/Belt Drive Horizontal 4 Work load: W [kg] LEFB25 2 LEFB16 0 0 500 1000 1500 2000 Speed: V [mm/s] 42 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.

Modular Type Lubricators Series AL

H F G JIS Symbol (A) Lockable at the time of exhaust E 2 C D 1 3 (P) (R) Effective area mm2 (Cv) Model Port Size EXH 1/8 1/4 3/8 IN, OUT 1/4 3/8 1/2 IN to OUT 14 (0.76) 31 (1.68) 55 (2.98) OUT to EXH 16 (0.87) 29 (1.57) 42 (2.28) VHS20 VHS30 VHS40 A Paint color (Standard) Handle: Red Body: Platinum silver Use an air filter on the IN side for operating protection.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

How to Order AS500 AS420 JIS Symbol AS 42 0 02 Option Body size Nil None Caution 42 50 60 80 90 1/2 standard 3/4 standard 1 standard 1 1/4 standard 1 1/2 standard H (1) High temperature (5 to 80C) Low temperature (30 to 60C) Bore size L (2) Be sure to read before handling.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

17.7 AS221F-N02-07SD AS221F-02-10SD NPT 1/4 17.5 18.5 7.2 1.2 34.7 1/4" 13.2 25.2 34.5 17 21 10 18.5 44.5 35.3 44 42 18.3 40.2 AS221F-N02-09SD AS321F-02-06SD 5/16" 15.2 27.2 36.4 18.5 39.3 27.8 17 6 12.8 73 44 AS221F-N02-11SD AS321F-02-08SD 18.3 35.3 44.5 41 3/8" 29.5 18.5 8 15.2 21 76 18.3 R 1/4 19 23 9.8 1.2 49.3 21.3 54.8 AS321F-N02-07SD AS321F-02-10SD 1/4" 13.2 27.8 39.3 17 43.3 31.8

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 J 10 20 50 70 100 250 280 500 595 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer MK-A020 87 123 290 320 525 640 1100 1520 D1350 1805 MK-A032 (g) Additional Weight 12 -X MK-A050 16 20 25 32 40 50 63 Bore size (mm) 20Both ends tapped style 6

DM

No. of connecting tubes Applicable tubing Accessories (optional) Polyurethane TU0425 Socket side only DM6S-04N DM6S-04NU DM6S-06N DM6S-06NU DM12S-04N DM12S-04NU DM12S-06N DM12S-06NU Nylon T0425 T0403 T0604 Soft nylon TS0425 Plug side only DM6P-04N DM6P-04NU DM6P-06N DM6P-06NU DM12P-04N DM12P-04NU DM12P-06N DM12P-06NU Multiconnector DM6-04N DM6-04NU DM6-06N TU0604 DM6-06NU 6 DM-C-6 TS0604

XL-OMY0002

60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42

Vacuum Unit Ejector / Vacuum Pump System

Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

CY1F

Wear ring C Slide table Adjuster holder Aluminium alloy Rolled steel plate Urethane rubber Aluminium alloy Special resin Special resin Special resin Aluminium alloy Carbon steel 13 14 15 16 17 18 19 20 21 Nickel plated Hexagon socket head plug Chrome molybdenum steel Hard anodized Hexagon socket head plug Chrome molybdenum steel 41 Cylinder tube gasket Piston seal Scraper NBR NBR NBR NBR 42

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 3 Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (optional) 30 2 25 Bracket (optional) SMC Max. 4 Panel mounting hole SMC Pressure gauge (optional) Panel Max. 4 Pressure gauge (optional) Panel 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 Approx. 123

E-P HYREG ® Series VY1 1

Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

71 123 195 306 537 Opening/Closing stroke (Both sides) (mm) 4 4 6 8 8 12 16 58 96 134 265 345 515 952 Mass (g) Note) Values for 16 to 25 are with gripping point L = 20 mm, and for 32 to 63 with gripping point L = 30 mm.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

ABSOLUTE POSITION DETECTION SYSTEM 121 to 125 12.1 Features . 122 12.2 Specifications . 123 12.3 Battery installation procedure . 124 12.4 Confirmation of absolute position detection data . 125 13.