Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

SFOD-OMT0009CN

B6 5 A6 B1 A1 2 1 B3 A3 (d) (5.7) 15 16 L (11) (30.7) (c) 10.6 [820m] (a) (b) LE CP *B 2 A B-1 1 A A-1 L 6 B B-2 5 ) 8 8m B A-2 3 COM-A/COM B-3 ) 4 A 10m COM-B/A-3 (c) ) B 15m Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 ) 7 A A-5 6 () B B-6 9 B A-6 8 3 (d) + B-1 4 A-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18)

IDU/IDF

Note 2) l/min (ANR) Operating pressure (MPa) Inlet air temperature (C) Ambient temperature (C) Pressure dew point (C) Working fluid Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature (C) Electrical Specifications Rated Conditions Operating Ranges 35 0.7 40 32 10 Compressed air 5 to 50 0.15 to 1.0 2 to 40 (Relative humidity of 85% or less) Single phase, 100/100 to 110VAC

Series AP500

SS Hastelloy C-22 PCTFE (Option: Vespel) Flow Characteristics 2.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (inch) 2 2 2 2 2 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A B C D E A B C A B C D A B C A B C A 1 2 3 4 5 1 2 3 4 5 6 7 8 1 2 3 4 1 2 3 1 2 3 13.7 x 9 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 13.7 x 9 21.3 x 15.4 26.7 x 20.5 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 21.3 x 15.4 26.7 x 20.5 33.4 x 26.3 26.7 x 20.5 33.4 x 26.3 60.3 x 52.5 33.4 x

VQ4000

For replacement parts, refer to page 2-5-47. Refer to pages 2-5-40 to 2-5-43 for control unit.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 7 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

Hygienic Design Cylinder Series HY

Example) Prepare the mounting bolt of cylinder model HYQB20-5. The part no. is HY-M4 x 65L 2 pcs. Installation bolt C D HYQ/Without built-in magnet Material: Stainless steel D C HYQB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 HYQB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 D C D C Mounting bolt part no. Cylinder model Mounting bolt part no. Cylinder model Mounting bolt part no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Air Cylinder NCA1 Series

7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 5 7/8 2

NCA1

/4 1.125 1/4 5/8 1 15/16 5 2 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 5 7/8 2 5/8 3 1/4

Single Axis Electric Actuator Series LJ1H

C D B A 5 Standard Motor Series LJ1H10 Motor Output Slide Screw High Rigidity Direct Acting Guide 50W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 1.5m 1 Green 3 COM-A/COM B-3 3m 3 Blue 4 COM-B/ A-3 Shield 5m 5 Cable color Terminal no.

CQS

2 6 7 Long stroke 5[-2.5] 4.5[-2] 10[-7.5] 12[-9.5] 5 5.5 9 10 5 5.5 9 10 7 6 11.5 13.5 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 12 16 20 25 11 10.5 16 18 19.5 21.5 25 27 1 0.5 6 8 17 19 22.5 24.5 7 6 11.5 13.5 Bore size (mm) Anti-lateral load 1[3.5] 0.5[3] 3.5[-1] 5.5[-3] 6 5.5 9 10 12 16 20 25 0.5 1 5 7 6 5.5 9 10 0.5 1 5 7 17 19 22.5 24.5 10 9.5 13 14 5 5.5 9.5 11.5 5 4.5 0.5 1.5 10 9.5

Modular/F.R.L. Units Series AC

Note 2) 5 to 50C for the products with the digital pressure switch Note 3) Not applicable to the AC10A.

Cylinder with Lock

4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Fieldbus system Analog unit

0FFF 4095 5.25 21 0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB -20No.EX-OMN0038-C Input signal range: -10 to 10 V, -5 to 5 V, -20 to 20

ARM10/11

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

ARM10/11

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.