SQ1000/2000

to 8 (16) 1 to 4 (8) S D side 1 to 8 (16) 1 to 4 (8) 1 to 8 (16) Note 1) Separately order the cable assembly for type 20P P kit.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Mechanically Jointed Rodless Cylinder Series MY1

1 1 6 M4 x 0.7 10 4 7 3.5 1 1 6 Note) A set of brackets with floating mechanism consists of a left bracket and a right bracket.

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

Vacuum

.72 '1 .09 1 . 7 1 2.67 4.37 6.83 1o.7 1 0.015 0.060 0.'135 0.239 o.374 0.63 0.96 1.50 2.33 3.83 6.00 9.34 0.013 0,051 0 . 1 1 5 0.205 o.320 0.54 o.82 1.28 2.OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

EXxx-OMY0004

msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 Value for ON feedback delay time for Zone M 0 0 0 Reserved 0 0 1 Reserved 0 1 0 Reserved 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Output feedback for Zone M 0 Disable 1 Enable Bit 7 Reserved 55 No.EX##-OMY0004 Table 10-9 Byte2 Output feedback parameter zone 1 for Safety Mode (Module Passivation/xxx) Bit 2 Bit 1 Bit 0

Vacuum

.72 '1 .09 1 . 7 1 2.67 4.37 6.83 1o.7 1 0.015 0.060 0.'135 0.239 o.374 0.63 0.96 1.50 2.33 3.83 6.00 9.34 0.013 0,051 0 . 1 1 5 0.205 o.320 0.54 o.82 1.28 2.OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

EXxx-OMY0006CN

Valve diagnostics 1 Table 9-9 Valve diagnostics 1 Bit 0 12 0: 1 1 34 0: 1 2 56 0: 1 3 78 0: 1 4 910 0: 1 5 1112 0: 1 6 1314 0: 1 7 1516 0: 1 9.1.2.3. General diagnostics 2 Table 9-10 General diagnostics 2 Bit 0 1 0:1: 1 2 0:1: 2 3 0:1: 3 4 0:1: 4 5 0:1: 5 6 0:1: 6 7 0:1: 7 8 0:1: 9.1.2.4.

HRX-OM-Q026

HRX-OM-Q026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

HRX-OM-W032

HRX-OM-W032 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

A_HEC-OM-K001

A_HEC-OM-K001-1.7 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the Chemical Thermo-con . 1-1 1.2 Safety training . 1-1 1.3 Hazard Levels . 1-2 1.3.1 Definitions of Serious injury and Minor injury . 1-3 1.3.2 Symbols . 1-3 1.4 Hazard Warning Labels . 1-5 1.4.1 Location of hazard warning labels . 1-6 1.5 Safety Measures . 1-12 1.5.1 Precautions . 1-12 1.5.2 Protective

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3C60 [N.C., N.O. valve x 1 (each)] SJ3C60K with back pressure check valve SJ3C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

Vacuum Pad

Chart 1.

Vacuum Pad

Chart 1.

Vacuum Pad

Chart 1.

Vacuum Pad

Chart 1.

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0: