High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Battery-less

1 !

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

Aluminum High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80

MY1

1 !2 !

Fieldbus System

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

JXCx-OMT0001CN

[] (1) ():1 ():1 Undefined No.11 1 4096 X 800 1 (2) ():1 ():2 1600 1 (3) ():2 ():1 400 1 ):1 ():1 01 40974096 1 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 800 2.5mm Undefined No.12 1 4096 X 2 3 =1 /2 (3 ) =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1 -50No.JXC-OMT0001CN-C 9.3 XX X () 1:CW 2:CCW X ORIG direction 1 2 1 2: XX ORIG

HRX-OM-W032

HRX-OM-W032 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-S004

HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

5 Port Solenoid Valve, Series VQC

EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 ^{Residual pressure release valve perfect spacer VVQ4000-25A-1 Note 1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 A B P Throttle valve spacer VVQ4000-20A-1 PUSH LOCK Note1) Perfect spacers with residual pressure release valve cannot be combined with external pilot specifications}

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

AC Servo Motor Driver (SSCNET /H Type)

temperature of servo motor 1 SD (Note 1) (Note 1) (Note 1) 46.2 Abnormal temperature of servo motor 2 SD (Note 1) (Note 1) (Note 1) 46 Servo motor overheat 46.3 Thermistor disconnected SD (Note 1) (Note 1) (Note 1) (Note 1) 46.5 Abnormal temperature of servo motor 3 DB (Note 1) (Note 1) (Note 1) 46.6 Abnormal temperature of servo motor 4 DB (Note 1) (Note 1) (Note 1) 47 Cooling fan error

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Plug-in Unit

1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 A B P Throttle valve spacer VVQ4000-20A-1 VQ5 VQZ VQD PUSH LOCK Note 1) Perfect spacers with residual pressure release valve cannot be combined with external pilot specifications. 2-2-21 Series VQC Base Mounted Plug-in Unit Model Model Response time (ms) Note 2) Flow characteristics Series No. of solenoids Weight 4,

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !