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The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 0.7MPa, Ambient and fluid temp: -5° to 60°C (no freezing), Effective area (Cv): 0.6, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 0.7MPa, Ambient and fluid temp: -5° to 60°C (no freezing), Effective area (Cv): 0.6, Port size

Make sure workpieces mounted on the fingers do not interfere with other workpieces or the facilities around the fingers. *2 Secure the motor cable so that the cable is not repeatedly bent. 2.6 2.6 1.2 37 1.2 1.2 37 1.2 8 x M4 x 0.7 x 4 24 20 +0.025 0 2 x 3H9 ( ) depth 3 13.5 0.05 26 26 5.5 5.5 151 Battery-less Absolute Encoder Type Gripper LEHF Series Battery-less Absolute (Step Motor 24

Weights [g] Bore size [mm] 8 10 12 16 20 25 C85N 37 38 (44) 77 (84) 89 (95) 179 (176) 244 (241) C85E 39 40 81 93 185 249 C85F 35 37 71 79 164 227 C85Y 35 37 72 79 165 228 Without magnet Basic weight CD85N 37 39 (44) 78 (84) 90 (96) 183 (179) 248 (245) CD85E 39 41 81 93 188 253 CD85F 35 37 72 80 168 231 CD85Y 36 37 72 80 168 232 Additional weight per 10 mm of stroke 2.1 2.3 4.1 5.1 8.1 11.3

6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV XX YH YW Z NH PA PB PG Q PP QW QQ RR SS TT UU WW Model 40 20 3.5 153 7.5 30 9 11 3 9 10.5 7.5 MY1B16 27 37 40 4.5 7 10 22 26 32 160 50 25 4.5 191 11.5 36 11 14.5 5 10.5 12 10.5 MY1B20 33.5 45 50 5 8 12.5

42.5 34.5 30 24 47.3 37 37 30 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 The bracket is shipped together.

B2 GA GC 2-NN B H1 Width across flats B1 (Rc, NPT, G) FX FZ Eh8 D I 20 to 32 MM AL A K H F N1 1.5 Width across flats NA N2 FT Cushion valve (Width across flats 1.5) WB 4-FD S + Stroke Z + Stroke ZZ + Stroke FY 40 (mm) 13 8 AL D K MM NA NN B1 B2 Bore size 6 6 6 6 ZZ Z H H2 H1 S P N1 I F C2 A 52 40 40 34 B FX FZ FY GB FT 4 7 FD E 20-0.033 0 N2 GA GC WA WB WC 42.5 34.5 30 24 8 8 8 47.3 37 37

65 0.074 0 100 16 110 80 10 13 95 20 25 63 30 90 Up to 1500 116 40 37 80 0.074 0 Data ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 27 ND 25 MM 31 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 Bore size (mm) 50 52 63 342 10 37 1/2 215 27 24.5 31 M18 x 1.5 7.5 80 60 95 10 289 55 80 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 100 391 13 47 3/4 236 41

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

MB MC (Width across flats) MGPM, MGPL Common Dimensions (mm) MD Bore size (mm) MA MB MC MH ML MD MP MT 12 16 20 25 32 40 50 63 80 100 28 29 34 40 52 60 68 84 114 140 16 19 30 30 38 38 50 50 50 65 14 14 22 22 27 27 36 36 46 46 22 22 30 30 37 37 47 47 58 62 9 9 12.5 12.5 16 16 20 20 28 28 M5 x 0.8 M5 x 0.8 M8 x 1.25 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 3 3 3

25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116 100 to 750 40 41 16 1/4 25 26 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) 34 205 32 88.5 18.3 M6 x 1.0 4 6 27 154 6.5 4 M10 x 1.25 1/8 37 47 13 6.5 39.5 216 40 96.5 19.5 M6 x 1.0 4 6 27 161 8 4 M14 x 1.5 1/4 41.5 51 16.5 9 47 245 50 111.2 22.4 M8 x 1.25 5 7 31.5 183

38 41 32 33 34.5 37 35.5 37 39.5 44.5 46 1 4 17 18.5 26.5 21 17 10 3 8 1 2 25.0 35.2 22 1 4 17 3 8 1 2 3 8 1 2 20.9 12 28.5 22 17 39.7 50.2 22 (71) (84) 71 100 26.5 22 20.9 34 25 16 Reference dimensions after R(PT) thread installation.

80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 80 391 13 47 3/4 236 41 34

80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000

) 105 (77) 14 PA 12 PB B 1 95 (67) 65 (37) 12 PB B 14 PA 1 PA 5 3 R PA A 5 3 R P A SMC P R1 R2 SMC R1 R2 Dimensions inside ( ) are for sub plate Dimensions inside ( ) are for sub plate Throttle valve spacer Silencer box AXT503-23A AXT503-60A Throttle valve spacer (AXT503-23A) SMC 191.5 (163.5) 179.5 (151.5) SMC 165.5 153.5 114 R1 EA S L O W B 12 PB 14 PA 1 91 (63) 65 (37) 12 PB B 1 14 PA

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5

Note 32 Tie-rod Carbon steel 4 Zinc chromated 33 Tie-rod nut Rolled steel 8 Zinc chromated 34 Flat washer Steel 8 80, 100 35 Bumper A Urethane 1 36 Bumper B Urethane 1 37 Wear ring B Resin 1 38 Rod end nut Carbon steel 1 Zinc chromated 39 Magnet (1) 40 Rod seal B NBR 1 41 Piston seal B NBR 1 42 Cushion seal A Urethane 1 43 Cushion seal B Urethane 1 44 Cushion valve seal NBR 2 45 Cylinder

45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7 E 10 10 AMJ G Width across flats 37 F F E AMV Y Y AEP 8 8 34 34 HEP C C A A Related B D B D Equipment Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT63HB-A16 ZPT63HB-B 8 63 65 46 68 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58 85 37 48.5 78.5 27.5 M10 x 1.5 63 65 46 68 31.5 43 21.5 -B12 M12 x 1.75 -B16 M16 x 1.5 ZPT80HB-B

The part number XC3AA does not exist with regard to the port and cushion valve positions, because this is the standard specification. 32 40 50 63 80 100 139 146 166 166 192 208 7.2 9.7 10.5 12 14 15 M14 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 6 7 10 10 10 16 51 58 68 68 74 90 16 20 25 25 30 36 30 35 40 40 40 50 27 32 37 37 37 47 With Heavy Duty Scraper -XC4 Heat Resistant

For details about the follwing auto switches (D-B76/B73/B73C/G79/K79/K79C/B80/B80C), please inquire of us. 8-21-37