100VAC, 120°C at 200VAC Heater, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD
Part Number Description: HIGH VACUUM VALVE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 2X Part Code: 1 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number
Part Number Description: HIGH VACUUM VALVE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 2X Part Code: 1 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number
Part Number Description: HIGH VACUUM VALVE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 2X Part Code: 1 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number
Part Number Description: HIGH VACUUM VALVE SLOW EXH Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 2X Part Code: 1 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number
Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)
(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston
2.5 to 40 mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .
Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Bore Size: Ø20 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 40 mm, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal
Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Valve Type: XYD (In-line Type, 2 State Control, Single Acting, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9B--Solid State, Gen.
Valve Type: XYA (In-line Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9B--Solid State, Gen.
Valve Type: Double Acting, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.
Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Valve Type: In-line Type, 2 State Control, Single Acting, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9B--Solid State, Gen.
Valve Type: In-line Type, Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9B--Solid State, Gen.
Magnet: Built-in, Mounting: B [Through Hole (Standard)], Bore Size: Ø20 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 40 mm, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -
155 180 205 230 Bore size Stroke range B E F FX FD FT H 20 Up to 125 40 12 2 28 5.5 6 35 25 Up to 200 44 14 2 32 5.5 7 40 32 Up to 200 53 18 2 38 6.6 7 40 40 Up to 200 61 25 2 46 6.6 8 50 * End boss is machined on the flange for E.
2 (n 4) 2 D-M9/M9W 20 + 40 85 + 40 95 + 40 100 + 40 105 + 40 115 + 40 "n" pcs.