°C, with 80°C at 100VAC, 100°C at 200VAC Heater, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External - Hard Anodized; Internal - Oxalic Acid Anodized, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: Valve Seal; In Addition for XLD

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE SLOW EXH   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Solid State Auto Switches

40 40 45 50 45 63 45 80 45 100 Mountable models 50 Note) The operating range above indicates average values at room temperature including hysteresis (assuming approximately 30% dispersion).

HIGH VACUUM VALVE

Air Cylinder

, 50, 75, 100, 125, 150, 200 MB 40, 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300 Please consult with SMC for strokes which exceed the standard stroke length.

10

136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2 38 1/2 120 50 148 148 17 15 223 With Rod Boot [mm] Bore size [mm] d e f l 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51

ISO Standard Hydraulic Cylinder

A6/A59W cannot be mounted to 40, 50.

15

8 50 36* 4.5* 40.1 69.8 61.4 M4 x 12 M5 x 25 10 LZ 32 LC3F2 NZ M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NX M5 x 0.8 9 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12

Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

Environment

How to Order R 6N 1 1 D B 25 50 LEY X5 o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

ISO Cylinder

20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

surfaces (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 (n = 4, 8, 12, 16, ) Note 2) 90 + 50 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) D-B59W n Same surface 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 15 90 100 110

CHKD/CHKG

63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

Bore size 32 to 63 M9BW MHS2 D 50 Made to Order Refer to page 545 for details. 2 fingers Number of fingers 2 Number of auto switches Nil S 2 pcs. 1 pc. Action Bore size Double acting D 32 40 50 63 32 mm 40 mm 50 mm 63 mm Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.