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100VAC, 120°C at 200VAC Heater, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD

°C, with 80°C at 100VAC, 100°C at 200VAC Heater, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External - Hard Anodized; Internal - Oxalic Acid Anodized, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: Valve Seal; In Addition for XLD

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

. # NVS 412+21OgD ls a NVS 412i|-m(xlD valv mounted on a#21 Manilotd Btock. IO ONDER "FACIORY BUIL?' VALVE'TSANIFOLD ASSEMBLY Exlmpla 1 pce. Flve Station Manifold Ass'y oomprtstng: Slatlon t. NVS,fi2+2to9D Slatlon 2. NVS 423,t3109O Stallon 3. NVS 4434.31090 Statlon 4. NVSA 4124-41N (3) Blocking dlscs in P, EA & EB galterts Station 5. NVSA 423438N 1 Pc.

Part Number Description: HIGH VACUUM VALVE SLOW EXH   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg

JIS Standard Hydraulic Cylinder CH2E/CH2F/CH2G/CH2H Series CHQ CH2E Series CHK CHN CHM CHS CH2 CH2 CHA Related Products Nominal pressure: 3.5 MPa DBore size (mm): 32, 40, 50, 63, 80, 100 CH2F Series Nominal pressure: 7 MPa Bore size (mm): 32, 40, 50, 63, 80, 100 CH2G/CH2H Series Nominal pressure: 14 MPa Bore size (mm): 32, 40, 50, 63, 80, 100 357 JIS Standard Hydraulic Cylinder Double Acting

Tie-rod Type Hydraulic Cylinder CHA Series CHQ CHK CHN CHM CHS CH2 CHA CHA Related Products DCHA Series Nominal pressure: 3.5 MPa Bore size (mm): 40, 50, 63, 80, 100, 125, 160 395 Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod CHA Series 40, 50, 63, 80, 100, 125, 160 3.5 MPa How to Order Bore size 40 50 63 80 100 125 160 Cylinder options 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm 160

S n Thread type Nil Rc1/4 NPT1/4 G1/4 TN TF Bore size Made to Order MK 40 50 63 40 mm 50 mm 63 mm Refer to page 422 for details.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Mounting: Basic type Number of auto switches Bore size Nil S n 2 pcs. 1 pc. n pcs. 20 32 40 50 63 80 100 20 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Without auto switch Nil Auto switch type Select applicable auto switch models from the table below. Cylinder stroke (mm) Refer to the standard stroke table on page 243.

Compact Guide Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS Bore sizes 80, 100 added. Port thread types NPT, G added.