High Pressure Coolant Valve

SGH Ex. 2) 3 port valve: Switching nozzle 12 VNC VNH Port 12(P1) (Pilot air SUP port) Nozzle Port 12(P1) (Pilot air SUP port) 3 1 2 VNH VNH Tank Coolant pump VND Switching nozzles on supplying coolant liquid.

42

(Refer to pages 482 to 485.) 26.4 48.7 5(R1) 3(R2) 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Circuit diagram Po Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A (1 pc.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type (mm) 1in = 25.4mm PA3000 115 68 85 105 4-7 7.5 FLUID OUT 3/8 5.5 AIR SUP (P1) 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (P1) 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN 1/2, 3/4 1/4 10 Series

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

Precision Regulator

)) Relief flow rate (L/min (ANR)) IR1010-01 IR1010-01 IR1010-01 Back pressure: 0.7 MPa Supply pressure: 0.7 MPa 0.4 0.204 0.7 Set pressure P2 (MPa) Set pressure P2 (MPa) Set pressure (MPa) 0.6 0.202 0.3 0.5 Set point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 40 80 120 160 200 0 50 100 150 200 250 300 350 Flow rate (L/min (ANR)) Supply pressure P1

CEx-OMQ0013

P1 No.

Title not found

P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No.

IR1000/2000/3000

IR1000-01 IR1000-01 IR1000-01 Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa 0.5 0.204 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.4 0.202 0.15 Setting point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 40 20 80 60 100 140 120 0 50 100 200 250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1

IR1000/2000/3000

02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1

MY2

g x Y m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

: Rolling D-X Static Moment 20Ceiling mounting Horizontal mounting Wall mounting Data M2 M1 M3 M2 M1 M2 y z X x Y X Z y X x Y m3 x g x m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note

I

ISE When the values of P1 and P2 are the same or when P1>P2 within three digits, the hysteresis will be automatically three digits for the set value of P1. Window comparator mode: ZSE The hysteresis is two digits, so separate P1 from P2 by five digits or more and set them.

VND

External Pilot Adiabatic Space Caution Caution Piping of pilot port (P1, P2) P1 and P2 piping should be as follows according to the model. There is a space between body and cover (: approximate 1 mm) for adiabatic effect.

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

15

M2 Motor M1 Motor mounting screw Actuator Component Parts Quantity Size 25, 32 40 1 Motor flange 1 1 No.

NCQ8

M2 bolt circle M1 W I dia.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

x 10 x 10-3 = 0.08 (Nm) Load factor 3 = M2 M2 max = 0.08 0.8 = 0.1 M2 8-14-12 12 Mechanically Jointed Rodless Cylinder Series MY3A/3B Calculation of Guide Load Factor 4.

MY1

max. m1 max. m3 max. m2 max. m1 max.

e-Rodless Actuator

Load factor 1 = m3 / m3 max = 7.025 / 22.5 = 0.31 m3 M2: Moment Z M2 max (from 2 of graph MY2H / M2) = 19.5 (Nm) . M2 = m3 x g x Z = 7.025 x 9.8 x 37.8 x 103 = 2.60 (Nm) Load factor 2 = M2 / M2 max = 2.60 / 19.5 = 0.13 m3 M2 5 Series E-MY2 Selection Example cont. X M3: Moment M3 max (from 3 of graph MY2H / M3) = 19.5 (Nm) .