MXS Series Air Slide Table

J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 Note) Refer to "Dimensions" of MXS 12 on P. 58 for one with shock absorber as symmetric.

Pneumatic Transfer System Series MF

1 0 10 6 (absorber stroke) 36 2-RB0806 shock absorber M8 x 1.0 0.5 (difference in level) 93 Note) Rc(PT) 1/8 Cylinder port 174 + Stroke 6 6 2-7 through 52 82 15 28.5 M5 x 0.8 Hexagon socket head plug 25 36 8 48.5 48 59 60 52 44 40 SMC 11 (width across flats) 11.5 Body (Support bracket) (MY-S25A (B)) Note) The dimension can be adjusted to a maximum of 108mm.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .

KR

61 55 20.9 12 20.9 22 22 45.4 45.4 VMG 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SS5YJ3-32, S32Station -M5 Stations L1 L2 SS5YJ3-32, S32Station -C4 3 52 44 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 20 230.5 222.5 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 Stations L1 L2 3 53 44 6 84.5 75.5 8 105.5 96.5 10 126.5 117.5 20 231.5 222.5 2 42.5 33.5 4 63.5

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 .

Compact Hydraulic Cylinder

760 860 480 500 520 540 560 580 600 620 640 660 52 1250 1400 860 890 920 950 980 1010 1040 1070 1100 100 63 80 100 1770 1970 1250 1290 1330 1370 1410 1450 1490 1530 1570 100 3550 4000 2380 2470 2560 2650 2740 2830 2920 3010 3100 172 4950 5500 3520 3630 3740 3850 3960 4070 4180 4290 4400 283 Specific Product Precautions Be sure to read this before handling the products.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) G H2 G H1 Width across flats B1 MM FZ FX Eh8 D I 20 to 32 Width across flats KA Relief port (10-, 21-) Vacuum port (11-, 22-) (32,40) Standard port 45 Width across flats NA FT K A AL 1.5 Z H ZZ + Stroke S + Stroke F FY 4 x FD 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

New

Unit: mm Mounting pitch A Straight Tube portion length size Nylon tube Soft nylon tube Polyurethane tube 1/8" 44 or more 84 or more 89 or more 29 or more 39 or more 56 or more 58 or more 70 or more 82 or more 25 or more 39 or more 57 or more 52 or more 69 or more 88 or more 16 or more 30 or more 32 or more 40 or more 50 or more 60 or more 2.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

REA/REB

Contents 20 REAH20-PS Above numbers 30, 31, 32, 33, 34, 35, 36 25 REAH25-PS 52 Sine Rodless Cylinder High Precision Guide Type Series REAH Max. Speed 300 mm/s Construction/25, 32 Dual axis type/REAHT Basic Type REA Direct Mount Type REAR Direct Mount Type REBR @1 @0 q !5 !4 !9 !8 Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL @8 #2 #0 !1 t y e i u !3 w #4 !7 !2 !6 !

Compact Cylinder with Air Cushion

O M J E D B K ( across flats) 11.5 depth 7.5 34 9 25 7 12 YB-03 32, 40 H (With locking) 14.5 depth 8.5 42 11 32 9 12 YB-05 50, 63 18 depth 12 52 13 38 11 16 YB-08 80 d1 d2 21 depth 14 62 17 50 14 19 YB-10 100 L UT Weight (g) Bore size (mm) Part no. RS W T1 T2 V C UA Material: Chrome molybdenum steel (nickel plated) 9 50 80 18 6.5 10 YB-03 32, 40 Part no.

RQ

K ( across flats) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Weight (g) Bore size (mm) RS W T1 T2 V Part no. C UA Material: Chrome molybdenum steel (Nickel plated) YB-03 32, 40 9 50 80 18 6.5 10 Part no.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

.: 4 and 5/32" 17.5 (Pitch) P = 10.5 18 1.5 SS5YJ3-32,S32Stations -M5 Stations n L1 L2 10-SS5YJ3-32,S32Stations -C4 3 52 44 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 2 stations 41.5 33.5 20 stations 230.5 222.5 Stations n L1 L2 3 53 44 6 84.5

SFOD-OMT0005CN

13.1 . 52 13.2 No. . 52 (1) . 52 [2] . 53 [3] . 54 [4](HOLD) . 54 [5] . 55 [6] . 55 (7) . 56 13.3 . 57 14. 58 14.1 [5m ] . 58 14.2 [820m] . 58 14.3 ()[5m ] . 59 15.4 ()[820m] . 59 14.5 . 60 14.6 . 60 14.7 . 60 -2- 14.8 . 61 15 . 62 15.1 IO . 62 15.2 . 63 16/ . 68 17/ . 69 17.1. . 69 17.2 . 70 17.3. . 71 17.4. . 72 17.5 . 73 17.6. . 73 18 . 74 18.1. / . 74 18.2 . 75 18.3 .

MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments. Improved accuracy with smooth operation Low profile design Reduced bending moment and vibration Stroke selection is available. 3 standard stroke lengths are available for each bore size.

MHF2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments.