ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y 4 4 Connection 1.6 thread 29 B D 6 15 10 94 40 43 15 99 45 25 109 55 63 37 02 1.2 Width across flats 12 A N S U F GN GS 6 63 37 15 10 94 40 43 15 99 45 25 109 55 N4 N6 U4 U6 J K ZP Y U 04 A8 1.6 Width across flats 7 6 63 37 15 10 94 40 43 15 99 45 25 109 55 06 08 2.5 F 17.5 Dimensions Per Vacuum Inlet C2 Model E F Fitting part

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-55-1B(-Q) SY5000-55-1B(-Q) SY7000-55-1B(-Q) Applicable series Applicable series 10-SY3000 10-SY3000 10-SY5000 10-SY5000 10-SY7000 10-SY7000 One-touch fitting (Inch size) One-touch fitting (Inch size) Port size 5/16" One-touch fitting 3/8" One-touch fitting 3/8" One-touch fitting Assembly part no.

smcmaintenancepartslist

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

CG1

(67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55 4.5 6 125 101 100 28.5 30 188.5 (202.5) 197.5 (211.5) +l CJP 60 (74) 65 150 121 120 192 (206) 201 (215) +l Note) ( ): Long stroke CJ2 Flange (mm) CM2 Stroke range Rear flange ZZ Bore (mm) FT FD FX F E B C85 Without rod boot With rod boot Front Rear 20 25 32

Profile Design ISO/VDMA Air Cylinder Series CP95

ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11 5.5 5 50 46.5 15 27 16 21 20 40 10 9 65 15 6.5 5 51 19 63 56.5 15 32 16 21 23 45 12 9 75 15 6.5 5 80 72 18 36 20 25 27 45 14 11 95 18 10 5 100 89 18 41 20 25 30 55 16 11 115 18 10 5 1.8-11 Series

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

70astamb1

32 38 46 56 72 89 50 162 Up to 700 53 132 55 170 Up to 800 59 In the case of w/o air cushion, it comes with rubber bumper.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

mb1

32 38 46 56 72 89 50 162 Up to 700 53 132 55 170 Up to 800 59 In the case of w/o air cushion, it comes with rubber bumper.

VQZ1000/2000/3000

Foot bracket For bracket assembly modes, refer to page 2-7-28. 5 1 3 2-2.2 die-cast hole (For manifold gasket positioning) PE port L plug connector (L): VQZ1120 1-L-C3/C4/C6/M5 M plug connector (M): VQZ1120 1-M-C3/C4/C6/M5 Cross section 0.23 mm2 Cover diameter 1.5 300 (Lead wire length) 83 (Single metal) 300 77 (Single metal) (Lead wire length) 81 (Single rubber) 75 (Single rubber) 61 55

Shock Absorbers and Rate Controls

.63 (l.R)0tl{l l.l 5x2 8.54 8.74 174-t2lJNF .38 l . t 3 1.20 5.43 t.l0 .55 .21 l . t 2 .63 (LR)OIl{ll.25r I 5.92 6.12 r%-r2 UNF .38 t . t 3 1.20 3.81 t.l0 .55 .2t 1.25 .0J (LR)Otlll|.25r2 8.54 8.7 4 r%-r2 UNF .38 t . t 3 1,20 5.43 t . t 0 .55 .21 t.25 .63 ^otesr 1 Alrshdk absorbrs wr]] ldnclro. satistiiCof,t dt 5% of the r narimum raied ener4y per c!

Square Tube Type Air Cylinder Series MB1

3.2 3.6 4.5 4.5 32 38 46 56 72 89 53 59 50 162 132 55 170 72.5 148 70 190 When there is no air cushion, the unit is equipped with rubber bumpers.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same

2/3 Port Valve

) Air/Water=1 4.2-6 VNA Port size 6A, 8A, 10A VX VN VQ Main Port Rc(PT) Model 1 8 1 4 3 8 VNA1-6A VNA1-8A VNA1-10A EZ, TZ, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55

7

CKP1 series (mm) Bore size (mm) CKP1 Shortened dimensions Current model 40 50 63 7 2 2 58 56 56 65 58 58 CKG1 series (mm) Bore size (mm) CKG1 Shortened dimensions Current model 40 50 63 2 2 2 53 56 56 55 58 58 Total tube length reduced Total tube length reduced Mounting dimension Mounting dimension With air cushion Unclamped side (Head end)Standard Air cushion on both endsMade to Order (-

IDG

5 to 50 5 to 55 Ambient temperature (C) 5 to 50 Standard perfor mance Outlet airatmospheric pressuredew point (C) 15 Inlet air flow rate (l/min(ANR))(2) 28 56 665 111 222 335 560 830 1110 Outlet air flow rate (l/min(ANR)) 25 50 100 200 300 500 600 750 1000 Purge air flow rate (l/min(ANR))(3) 3 6 11 22 35 60 65 80 110 Bracket Assembly (Accessory) Part No.

High Power Cylinder:

56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35 H 44 48 51 54.5 LD 7 7 7 9 K 5 5.5 5.5 7.5 JD 30.5 25.5 28.5 23 H2 8 8 9 11 Bore (mm) 20 25 32 40 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 LZ 55 55 60 75 NE 33.5 37 43.5 52.5 LY 41 46.5 53 62 ZZ 265 270 278 292 NB 30 36.9 43.9

F

22 57.4 5/16 3/8 KQU09-U02 17.46 15.2 51.5 15.2 45.5 18.5 6 12 38 KQU12-U03 22 20.9 61 20.9 55 22 57.4 3/8 1/4 KQU11-U02 19.05 17.9 56.5 17.9 50.5 21 7 12 12 KQU12-U04 22 20.9 62.5 20.9 54.5 22 57.4 3/8 3/8 KQU11-U03 19.05 17.9 56.5 17.9 50.5 21 7 3/8 1/2 KQU11-U04 22.23 17.9 59 17.9 51 21 7 1/2 1/4 KQU13-U02 22.23 21.7 61 21.7 55 22 9.6 1/2 3/8 KQU13-U03 22.23 21.7 61 21.7 55 22 9.6 1/2

Round Type Low Pressure Hydraulic Cylinder Series CH
M

M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.