Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

CHKD/CHKG

CHKGL--XC64 A C C B 293

RSQ

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 -X 20Data 10-8-21 22 22 Series RSG Rod End Configuration: Lever Type with Shock Absorber Variable energy absorbing type/Flange mounting style These 2 figures show the piston rod extended.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Series AK1000

Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.

7ND9071en

Output: Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H.

Prevents Micro-Bubbles

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

HRX-OM-W002

MT.01MT.05 D.OUT2 MANT CODE No.20 screen Contact output signal 3 function ALM 1 D.OUT3 SEL No.21 screen Contact output signal 3 operation B A/B D.OUT3 TYPE No.22 screen Contact output signal 3 alarm AL.01 AL.01AL.32 D.OUT3 ALARM CODE No.23 screen Contact output signal 3 maintenance MT.01 MT.01MT.05 D.OUT3 MANT CODE Selectable from ALM/SW1/SW2/A.SEL/M.SEL 5.3 List of parameters HRR

CG1

16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15

Round Type Hydraulic Cylinder

D-A9 D-M9/M9W/M9A Hs Hs A 24.5 (22) B A 22 (24) B Values inside ( ) are for D-M9AV. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. Values inside ( ) are for D-M9AV. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

MGC

B B B B B 16 (24) A 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 20 27.5 27 24.5 25.5 29 27 24 31 30 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 30 29.5 27 25.5 29 27 24 31 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 33.5 33 30.5 26.5 30 28 25 32 31 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 40

LVQ

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Series IDG

, 60HM IDG75M, 75HM, 100M, 100HM 191 186 101 80 365 204 202 104 90 368 241 262 16 19 129 147 7 9 95 108 50 55 22 25 3/8, 1/2 1/2 27 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm IDG60LM, 75LM, 100LM IDG60SM, 75SM, 100SM Port size 3/8, 1/2 (250) 91 Purge air for dew point indicator 50 77 84 13 18 22 IN OUT 40 10 OUT 165 (B) 9 Drain Drain Purge air for dehumidification (Maintenance

IDG

Accessory None (Standard) With bracket (Except IDG1) Nil B Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory.

5 Port Solenoid Valve, Series VQC

B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM spec. Positive COM spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec.

Stopper Cylinder

A (22) 22 B A Hs Hs 24.5 ( ): For D-A96 type 16 16 A B A B Hs Hs D-C7 D-C8 D-C73C D-C80C D-H7 D-H7W D-H7NF D-H7BA D-H7C B A Hs B Hs A Auto Switch Proper Mounting Position Auto Switch Mounting Height Auto switch model (mm) (mm) RSQ D-H7BA D-H7W D-H7 D-H7C D-H7NF D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-C7 D-C80 D-C73C D-C80C D-M9V D-M9WV D-M9AV D-A9V D-M9 D-M9W D-M9A D-A9

CJ2

B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).