Table of Contents

side n Stations 8 7 6 5 4 3 2 1 U side VQD P P A A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

C85

C76 Hs C85 8.5 D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F 23 B A 1 Hs 11 C95 CP95 Auto Switch Mounting Position (mm) D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL D-H7NF NCM D-A79W 13.3 13.3 10 B A 26 Bore D-J79C NCA 17 Hs D-X A B A B A B A B A B D-F7V D-F7WV D-F7BAVL 1 8 10 12 16 20 25 4 4 5 5

CQS

a) b) a) b) D-A9V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-M9 D-F9W D-M9V D-F9WV D-F9BAL 7-4-42 43 Compact Cylinder: Anti-lateral Load Type Double Acting, Single Rod D-M9, D-F9W Auto switch model D-A9 D-A9V D-M9V, D-F9WV Symbol A B W A B W A B A B HS HS

VQZ1000/2000/3000

C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Grommet (G) n 5 Manual override VQC B 4 4 SMC SMC 2 A SQ (L4) (L3) L2 L1 5 18 P = 16 B 4 3 SMC SMC 2 A VQ0 B 4 2 SMC SMC 2 A B 4 VQ4 SMC 1 SMC 2 A VQ5 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Table of Contents

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

A

www.stevenengineering.com I 1.84 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCA1 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S D U A L O P E R A T I O N D O U B L E R O D X C 1 0 O P T I O N XC10 N + NC A1 R A U T O S W I T C H C A P A B L E S T R O K E B M O U N T I N G C U S H I O N S B O T H E N D S N N O N E H H E A D E N D R R O D E N D B O R E S I Z E S T R

Hydraulic

U D-A79W D-F7WV D-F7V D-F7BAVL A B A B Proper auto switch mounting positions (mm) D-A7H, D-A80H D-A73C, D-A80C D-F7 D-F7V D-F7W, D-F7WV D-J79 D-J79C, D-J79W D-F7BA D-F9 D-F9V D-F9W D-F9WV D-A7 D-A80 D-A9 D-A9V D-A79W D-F7NTL D-F7F D-F9BAL Bore size (mm) A B A A A A B A A A B B B B B B 20.5 11.5 21 18 25 26 12 9 16 17 20 27 20 27.5 24.5 31.5 26 19 30 29 32.5 20.5 17.5 24.5 23 22 25.5 32

CXS

B (mm) Symbol D-A90, D-A96 15.4 13.4 5.4 D-A93 15.4 10.9 7.9 D-F9 19.4 0.6 9.4 9.4 A B Note) C D A C Note) For D-A90, D-A96, and D-A93, only outward electrical entry (D dimension) is available.

MXQ

Solid State Switch: D-M9B, D-M9N, D-M9P, D-F9BW, D-F9NW, D-F9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 40 50 150 75 100 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MXQ8 26 2 2 6

REA/REB

D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H 32 6 3 4.5 D-A73C/A80C D-F7/J79 D-J79C

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators NDh8 NDh8 Section Y detail GA GC Y YY GA GC Mounting nut Relief port 2 x M5 x 0.8 Section YY detail NN NN MM Rod end nut Piping port 2 x M5 x 0.8 MM C D D B 0 0.3 NA H A F B 0 0.3 F NA S + Stroke A Z + 2 x Stroke H + Stroke M12 x 1.0 M10 x 1.0 NN (mm) 16 10 15 15 18.3 15 20 17 8 8 5 5 11 11 28 28 20.5 20.5 D H Bore size B F MM NA GC GA C A

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

NDh8 WB WA Section Y detail Y GB GC GA Section YY detail NN YY Mounting nut Relief port M5 x 0.8 MM NN WW Rod end nut Piping port 2 x M5 x 0.8 C D B 0 0.3 B 0 0.3 F Z + Stroke S + Stroke NB H NA F A (mm) NDh8 GC 5 5 22.9 22.9 10 16 109.5 110.5 73.5 74.5 45 45 13.4 13.4 20 20 29.5 29.5 M4 x 0.7 M5 x 0.8 28 28 6.5 6.5 8 8 4 5 17 20 15 18.3 15 15 Z S WW WB WA NB NA NN MM H GB GA F D C B A Bore

SZ3000

2 B 2 B 2 B 2 PE R 3 B 2 R 3 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P= 10.5 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 2n1-M5 x 0.8 (A, B ports) (L4) L3 (3.2) 101.2 U Side D Side 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 DIN rail Manual override

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

model D-C7/C8 D-C73C/ C80C D-H7W D-H7NF D-H7BAL D-H7 D-H7C C85 D-B5/B6 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL C95 Applicable bore size (mm) A B A B A B A B A B HS HS HS CP95 20 9 3 6 8 4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 17 40 14.5 8.5 11.5 13.5 10 35 37.5 38 23.5

REA/REB

A RE A B A dimension B dimension Auto switch model REC D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F CX D-A73/A80 D-F7NTL D-A73/A80 D-F7NTL CY Bore size (mm) MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

REA/REB

Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7