Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

AS

D3 Applicable tubing O.D. d D1 A L4 L3 M T L1 L2 H (Width across flats) Metric size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) Model Weight d (g) Lock Unlock Lock Unlock AS12;1F-M5-02A 2 5.8 15.8 20.6 11.9 AS12;1F-U10/32-02A AS12;1F-M5-23A 16.9 3.2 7.2 5 M5 x 0.8 AS12;1F-U10/32-23A 9 9 26.5 25.4 23.5 22.4 17.2 22 10-32 UNF AS12;1F-M5-04A 4 8.2 13.3 AS12;1F-U10/32-04A AS12;1F-M5-06A 16.5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH VHS Pilot port (A side) 2-M5 x 0.8 sub-plate side (P , A, B port) (R1, R2 port) 2 position double: VZA4241--01 02 Pilot port (B side) Body side Pilot port (A side) 2-M5 x 0.8 body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-7 8 Series VZA4000 Dimensions: Base Mounted 3 position closed center

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

section 0.34mm2 Manual override 42 36 3 SX VK 69.5 (Metal seal) 67 (Rubber seal) (47.5) VZ VF SMC VFR 46.5 40.5 VP7 R1 R2 A, B port 20 14.6 12 10 10 P VP4 PE port 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 13.4 13.4 1.1 M5 X 0.8 External pilot port (Only external pilot style(R)) VQ VQ4 VQZ 0 1 M plug connector (M): VQZ115 (R)lMl01 L plug connector

Air Slide Table Series MXS

x 8 M5 x 0.8 P M MXS-AS6 (L)-X11 15 26.5 C A 5 16.5 MXS-AS8 (L) MXS8 (L) 7 21.5 8 3 14.6 7 10 M3 x 10 11 M3 x 12 15 26.5 MXS-AS8 (L)-X11 M6 x 1 MXS-AS8 (L)-X12 25 5 36.5 B 20 MXS-AS12 (L) E MXS12 (L) 9.5 12 4 18.5 10 13 M4 x 12 16 M4 x 15 31 M8 x 1 15 30 MXS-AS12 (L)-X11 MXS-AS12 (L)-X12 25 40 D F MXS-AS16 (L) 5 24.5 MXS16 (L) 11 14 5 12 16.5 M5 x 18 19 M5 x 18 37 21 MXS-AS16 (L)-X11 15

24

[mm] MGPM, MGPL Common Dimensions Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 16 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 7 6 30 10.5 7.5 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 20 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 78 62 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

SYJ300/500/700

50.8] VT VP (Light/Surge voltage suppressor) VG 41.5 [48.5] + M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7

LX

10 0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 254 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2SA Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

•

L M ,. Flat type Flat with rib (mm) Flat type Flat with rib mm M~ .. 'B c l D E Model M 'B C D E F G 1:4 1:6 Y 'A Y .' 1:6 H 1:8 H F G Flat with rib H H Flat Aatwith rib Flat ZPT25g ...

REA/REB

4 @5 RE A B REC CX CY MQQ M !5 @8 @9 !9 #0 @6 !0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

REA/REB

s 2 or less (REA) or 15 m/s 2 or less (REB) Throughput dramatically increased (Maximum speed: 600 mm/s) RE A B Series REB introduced with a maximum speed of 600 mm/s.

Rotary Table/Rack & Pinion Style Series MSQ

10 L S Thread type M9BW 2 End port type Size 10, 20 A B High precision type Basic type Nil Nil -XF -XN M 5 Rc 1/8 G 1/8 NPT 1/8 30, 50 Size 10 20 30 50 Side ports are all M5.

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

Rotary Clamp Cylinders

0.15 0.1 0 0.052 5.5 54 72 8 62 40 28 M6 x 1.0 35 50 63 0 0.062 6.6 67 89 9 76 50 M8 x 1.25 0.15 0.1 9 80 108 9 92 60 M10 x 1.5 0.15 0.1 With arm Rod end width across flats F + Clamp stroke C + Clamp stroke D A F E B A 2 x G B D G C H (mm) (mm) H G G F F E D D C C B B A A Model MK32-M MK40-M MK50-M MK63-M Model MK32-N MK40-N MK50-N MK63-N M8 x 1.25 6.2 35.5 18 45 36 20 53.5 9 67 14 18 6

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Elbow: M-5HLH-4/-6 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 Width across flats 7 Model A B C D E F G H I M M 12 13.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 5.5 6 15 16 7 8 5 6 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L Tee: M-5T M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Weight: 3.5 g Weight: 4.2 g Universal Elbow: M-5UL Universal Tee: M-5UT Width across flats 7 2 x M5 x 0.8 Width across