CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note VZ2000-37A-2 For VZ22 AN120-M5 Noise reduction: 18 dB or more (8 x 17l ) AN110-01 Noise reduction: 21 dB or more (13 x 38l ) Description M5 R 1/8 (2) Silencer Note 1) For body ported type Note 2) For sub-plate mounted type 4-15-1 2 Series VZ200 How to Order Option M5 1 2 VZ2 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Series VZ200 Only body ported type Type of actuation

CRQ2

Thread type Port type Port type Nil Nil TF TN TT Size 10, 15 Number of auto switches Port type Nil Nil TF TN TT Size 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil S 2 pcs. 1 pc. 20, 30, 40 20, 30, 40 Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.

Large Size Vacuum Module: Series ZR

M5 M5 Common release pressure supply port (PD) Common exhaust port (EXH) Mass (Rc, NPTF, G) 1 2 Basic mass for one station is 0.28 kg.

Compact 5-Port Solenoid Valve

b 650 g 770 g b 1140 g Weight 1500 g b 3700 g Lightweight: 59% lighter 1500 g b 3700 g 6.6 Sonic conductance C [dm3/(sbar)] VQ4000 JSY5000 Series 2.1 times C [dm3/(sbar)] 6.6 b 3.2 Lightweight: 32% lighter 770 g b 1140 g 2.8 VQ2000 JSY3000 Series 2.8 times C [dm3/(sbar)] 2.8 b 1.0 Lightweight: 29% lighter 460 g b 650 g 0.9 JSY1000 Series VQ1000 10 6.4 15.5 24.6 Valve width [mm] Wiring D-sub

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ22(R)-G-C4/C6/M5 C4, C6, M5 C4: One-touch fitting for 4 2-3.5 mounting hole C6: One-touch fitting for 6 70 300 (Lead wire length) M5: M5 thread 22.5 29.5 19.3 R2.7 27 34 V100 A 11 15 SMC 2 8 Cover dia.1.6 Cross section 0.34 mm2 Manual override 3.5 20.5 SY 34 M3 x 0.5 External pilot port (Only external pilot

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

51 g 48 g 47 g 54 g 46 g Body (Bottom ported) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g 25 3-Screen Display High-Precision Digital Pressure Switch for General Fluids ZSE20C(F)/ISE20C(H) Series Set Pressure Range and Rated Pressure Range Set the pressure within the rated pressure range.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

4 5 G H Grommet (G), (H): SYJ3 40-M5 M5 x 0.8 (A, B port) 10 5 10 SV SZ 2-3.2 (For mounting) 15.3 32 SY 22 3 2.5 Manual override SYJ B A 11 A B SX 37.5 [39.7] G: Approx. 300 H: Approx. 600 (Lead wire length) 91.7 [96.1] (Light/Surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M)

Electric Actuator

LEFS LECS: LECA6 LECP6 LEC-G LECP1 LECPA LEFB Actuator side (10.5) Connector C (14.2) (Terminal no.)

One-touch Fittings Series KQ2

(mm) Weight (g) Thread R(PT) H (Hex.) M5 A D1 L1 D2 M L2 Part No.

MGP

4-OA 4-OB counter bore depth OL XX section XX section L Through 4-NN WA Z X0.02 X0.02 DA DB VB VA R U X T H PW 2-P XAH7 6 depth XAH7 depth 6 GA PB Q 2-P (Plug) PA+Stroke GB J K S FB FA C+Stroke B+Stroke E A+Stroke G MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15

I

T h e V YH y R e g R a n g e i s c o n s t r u c t e d b y u t i l i z i n g a standard control unit either alone (VY1D00-M5) or as a Pilot Valve controlling one of the Range of VEX1 Power Valves.

SMC Pneumatic Clean Series

G H2 (Rc, NPT, G) Width across flats B2 Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

Air Slide Table Series MXS

Retraction End Stroke adjustment range (mm) A Applicable size J K E D B C F G H Model 16.5 MXS-AT6 (L) 5 MXS6 (L) 21 19 10.5 8 5 7 2.5 M2.5 x 8 M5 x 0.8 26.5 MXS-AT6 (L)-X11 15 For MXS6, MXS8 16.5 MXS-AT8 (L) 5 D MXS8 (L) M3 x 10 M6 x 1 E 25 12.5 9 6 8 3 22.5 26.5 MXS-AT8 (L)-X11 15 E H 36.5 MXS-AT8 (L)-X12 25 5 20 MXS-AT12 (L) G MXS12 (L) 32 18.5 13 8 12 4 31 M4 x 8 M8 x 1 30 MXS-AT12 (

1

thread M A B C D E mF G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5 29 14 19 (40.4) 37.4 17 20.3 36 15.5 98 g * Value in ( ) is the dimension when the dust cover is used.

Rotary Actuator

Flange Flange Rotary actuator Rotary actuator Assembly Part No.: P211060-2 (for C;RB2F;;20) Assembly Part No.: P211080-2 (for C;RB2F;;30) 6 x countersunk head screw 6 x countersunk head screw for M5 conical seat and through-hole for M4 conical seat and through-hole x x M4 countersunk head screw (3 pcs.) M5 countersunk head screw (3 pcs.)

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note1) C kit only.

REA/REB

CB CR A B C D F G GP GW H HA HC HR HS HT J x E Model REAR10 2 0.5 10.5 6.5 3.2 12 6.5 6 27 25.5 26 24 25 24 5 14 M4 x 0.7 x 6 REAR15 2 0.5 12 8 4.2 17 8 7 33 31.5 32 30 31 30 8.5 17 M5 x 0.8 x 7 Max.