Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Microspeed Cylinder

L C73CL None .

Vacuum Pad: Ball Joint Type

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Flow Control Equipment

-01 AS22l0M-02 0.8 Supply pressure 0.5MPa Supply pressure 0.5MPa Supply pressure 0.5MPa 50 10 20 0.15 0.3 Effective area (mm2) Air flow (l/min(ANR)) Air flow (l/min(ANR)) Air flow (l/min(ANR)) 40 Effective area (mm2) Effective area (mm2) 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 Number of needle rotation (Turns) 5 10 0 0 0 0 0 Number of needle rotation (Turns) 5 10 Number of needle rotation

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

AS1201F-M5, AS1211F-M5 AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 80 60 40 20 0 0 2 4 6 8 Number of needle rotations Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (

PF2A/PF2W

Flow rate measuring range Minimum set unit PF2 0.5 to 10.5 l/min 0.5 to 10.5l /min 1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse IF

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Process Pump

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) (44) W T R (Y) Z T 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

For notes w and e, refer to the left. 4B/6B 870 M20 X l 500 AMD1000 w When the element has reached its replacement interval, replace it immediately with a new element.

AR Series Modular Type Regulator

w Component Parts No.



(With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120-M5 N Silencer for breed port (PE) The optional parts are shipped in the same package.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

4-channel Flow Monitor ( compatible)

Y U8 0x02 (2) 3: 1Sor (OUT1 turns red at ON) 4: 2SoG (OUT2 turns green at ON) 5: 2Sor (OUT2 turns red at ON) Set the connection range of PF2A5. 0: 10 L 1: 50 L 2: 100 L 3: 200 L 4: 500 L rAnG (PF2A5, Selection of connection range) Y U8 0x00 1 R/W (0) Set the connection range of PF2W5. 0: 4 L 1: 16 L 2: 40 L 3: 100 L 4: 250 L rAnG (PF2W5, Selection of connection range) Y U8 0x00 2 R/W (0)

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series