2

(mm) Weight (g) Nylon Urethane 2 x Applicable tubing L1 L1 2 M3 x 0.5 KQ2T02-M3G 5.5 5.8 5.5 12.6 12.5 12.8 11.9 0.9 1.2 1.9 M5 x 0.8 KQ2T02-M5l 7 5.8 5.5 12.6 13 12.9 11.9 0.9 1.4 3 M M A L2 3.2 M3 x 0.5 KQ2T23-M3G 7 7.1 7 15.3 13.8 14.7 13.3 0.9 0.9 1.2 3.1 M5 x 0.8 KQ2T23-M5l 7 7.1 7 15.3 14.3 14.8 13.3 3.2 2.7 2.5 3.5 M3 x 0.5 KQ2T04-M3G 7 8.2 7 15.4 14.3 15.8 13.3 0.9 0.9 1.2 3.4 D2

Table of Contents

stud axis 4/2.5 x M5 6/4 x M5 M3 female x M3 female x M3 male For soft nylon and polyurethane tubing M-5ALU-4 M-3UT P. 58 Universal nipple M-5UN M-5ALU-6 P. 56 P. 57 Body rotates at 360 around the stud axis M5 male x M5 male PAT.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075

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Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

Air Slide Table

MXQ 8C-mm5 With buffer, axial piping (8) Pilot port M5 x 0.8 (OUT) 24.3 9.8 2 Pilot port M5 x 0.8 (IN) 13 6.3 Pilot port M5 x 0.8 (IN) 24.3 9.8 33.4 21 Symmetric type 28.5 6.3 2 x M3 x 0.5 thread depth 5 M Dimensions [mm] Pilot port M5 x 0.8 (OUT) 17 2.3 17.4 Model Standard type Shorter total length type ZZ M M MXQ8C-10Zl5 85 76.5 77.5 MXQ8C-20Zl5 95 86.5 87.5 MXQ8C-30Zl5 105 96.5 97.5 MXQ8C

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

KJ

stud axis 4/2.5 x M5 6/4 x M5 M3 female x M3 female x M3 male For soft nylon and polyurethane tubing M-5ALU-4 M-3UT P. 58 Universal nipple M-5UN M-5ALU-6 P. 56 P. 57 Body rotates at 360 around the stud axis M5 male x M5 male PAT.

ZP

x 0.8 M8 x 1.25 1/8 (Rc, NPT, NPTF) M8 x 1.25 1/8 (Rc, NPT, NPTF) Connection thread M8 x 1 M10 x 1 M14 x 1 M5 x 0.8 Vacuum inlet M5 x 0.8 Use the connection thread.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37

Table of Contents

(Example) For M3: L2 = 6 mm Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

suppressor) 41.5[48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 58.5[60.7] 48.7[50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6

Air Fittings & Tubing

nylon and polyurethane M-5ALU-4 M-3UT X M3 female X M3 male P.2.1-51 6/4 X M5 Union nipple M-5ALU-6 Body rotates at 360 around the stud axis P.2.1-49 P.2.1-50 M5 male X M5 male PAT Nipple Barb elbow (H) Body rotates at 360 around the stud axis Fitting to workpiece and fitting fitting connection possible M-5UN 4/2.5 X M5 M-5ALHN-4 For nylon tube M3 male X M3 male M-3N P.2.1-51 6/4 X M5 M5

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

ZP

x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2

CRB2/CRBU2/CRB1

(Example) For M3: L1 = 6mm Applicable shaft types: X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z J Z X Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37 Symbol

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

5 (Mounting screw) ( ): M5 x 0.8 M plug connector: VF1120-M-M5 01 (Lead wire length) Light window (With light/surge voltage suppressor) 300 (PE port) Manual override (Non-locking) 3-M5 x 0.8, Rc 1/8 (P, A, B port) (EA, EB port) 2-M4 x 0.7 depth 5 (Mounting screw) (Mounting hole) 2-M4 x 0.7 depth 4 (Mounting screw) ( ): M5 x 0.8 3-4-8 9 5 Port Pilot Operated Solenoid Valve Rubber Seal Series