Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) 1/4 C8 (8 One-touch fitting) C10 (10 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port Manifold base weight W (g) Note 2) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: Weight of DIN rail) Note 1) In cases such as those where many

15

M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50 36* 4.5* 41.4 89.8 66.9 M4 x 12 M5 x 25 10 40 * Dimensions after mounting a ring spacer 803 LEFS Series Dimensions: Motor Flange Option Motor mounting position: Motor parallel e w q r PD (I.D.)

Smooth Cylinder/Low Speed Cylinder

Cylinder Series CG1Y With Mounting Bracket Axial foot style: CG1YL LH B LT 2 x LC ZZ + Stroke LS + Stroke M W W X Y X Y Z LX (Knock pin position) 4 x LD LZ Axial Foot Style (mm) Y 7 7 8 8.5 11 13 14 16 X 15 15 16 16.5 22 22 28.5 30 W 10 10 10 10 17.5 17.5 20 20 M 3 3.5 3.5 4 5 5 5 7 LZ 44 49 58 71 86 106 125 150 LX 32 36 44 54 66 82 100 120 LT 3 3 3 3 4.5 4.5 4.5 6 LS 53 53 53 60 67 67 74

MY1

orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

Fluoropolymer Piping Equipment

E H J L N M W (T) X Min. port size LQ1F41 12 28 30 53 60 21 33.1 34 12 10 9.4 LQ1F42 10 58 7.4 LQ1F51 19 32 36 58 65.2 26 40 41 14 16 15 LQ1F52 12 63.2 9.4 LQ1F61 25 39.5 36 69 81.5 49 51 14 22.5 21.2 LQ1F62 19 15 3 SMC (W) (M) N J SMC 3/4 19 X H (E) (T) Class 4, 5 JIS 10K flange W Note) H Inch sizes Model Applicable tubing O.D.

REA/REB

M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3. Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.

REA/REB

M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3. Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.

ISO Cylinder

KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke + G mm) T Z LEF V EV J H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

CRB2/CRBU2/CRB1

Applicable shaft type: W (mm) (mm) Q1 = M Size Thread M3 x 0.5 Size 40 30 20 15 40 30 20 15 Thread M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 L2 = M5 x 0.8 M5 x 0.8 4.2 4.2 Q2 = M Symbol: A18 Symbol: A17 Shorten the short shaft. A parallel keyway is used on the long shaft for size 40. Applicable shaft type: W Shorten the long shaft.

CQ2

mounting height. 20.5 23.5 M14 X 1.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 28.5 20.5 23.5 28.5 26 28.5 33.5 26 28.5 33.5 32.5 35.5 43.5 32.5 35.5 43.5 Standard (mm) Bore (mm) 32 40 50 63 80 100 Stroke range (mm) 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 O N M I E L A H D F J K P Q S U W Z B C M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 M16 X 2.0 M20 X 2.5 10.5 10 13

MY1

Load Blocking Weight and Center of Gravity for Workpiece Y Center of gravity X Workpiece no. Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Tube bore x Length Speed controller Silencer Series MB Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 4 x 1 m AS1301F-04 AN120-M5 SZ3120-M5 3-3-19 19 Series VZ3000 Construction 2 position single 2 position double Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

CV/MVGQ

AL B B1 C D E F H1 HX J KA M MM N S W 40 50 63 M8 x 1.25 M8 x 1.25 M10 x 1.25 147 157 173 8 11 11 10 10 10 32 40 40 16 20 20 44 52 64 22 27 27 60 70 86 27 32 32 30 35 35 8 8 8 130.6 133.6 140.6 27 30 31 M14 x 1.5 M18 x 1.5 M18 x 1.5 19.4 16.4 18.4 14 18 18 Up to 500 Up to 600 Up to 600 20Data With rod boot Without rod boot The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

AL B B1 C D E F H1 HX J KA M MM N S W 40 50 63 M8 x 1.25 M8 x 1.25 M10 x 1.25 147 157 173 8 11 11 10 10 10 32 40 40 16 20 20 44 52 64 22 27 27 60 70 86 27 32 32 30 35 35 8 8 8 130.6 133.6 140.6 27 30 31 M14 x 1.5 M18 x 1.5 M18 x 1.5 19.4 16.4 18.4 14 18 18 Up to 500 Up to 600 Up to 600 20Data With rod boot Without rod boot The minimum stroke of the one with rod boot is 20 mm or more.

ZP

Calculation D n W P t : Pad diameter (mm) : Number of pads used : Lifting force (N) : Stable vacuum pressure (kPa) : Safety factor: Horizontal pad contact: 4 (dynamic) Vertical pad contact: 8 (dynamic) Pad W D = 3.14 x P x n x t x 1000 4 1 W W Horizontal lifting Vertical lifting Basically avoid this use. ( ) Selection Graph The pad diameter required for horizontal (selection graphs (1) and

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1.0 M6 x 1.0 10 10 14 18 50 63 M8 x 1.25 M10 x 1.5 80 M12 x 1.75 M12 x 1.75 22 22 100 DL Head end lock LL 4N through H thread effective depth C Rod end lock DM RF End lock mechanism WL 2 x 4O counterbore depth R ( ) Manual release Non-lock type I HR D M Z E 2-P (Port size) K M E Q A + Stroke B + Stroke F B + Stroke L Q Q J W A + Stroke End Lock Mechanism Dimensions Bore size (mm) HN (Max.