LEC-OM02904

53 5.1.2 54 5.1.3 55 5.1.4 56 5.1.5 57 5.1.6 57 5.1.7 58 5.1.8 59 5.1.9 5-10 5.1.10 5-11 5.2 (No.PB) 5-12 5.2.1 5-12 5.2.2 5-13 5.3 (No.PC) 5-20 5.3.1 5-20 5.3.2 5-21 5.3.3 5-24 5.3.4 5-27 5.4 (No.PD) 5-28 5.4.1 5-28 5.4.2 5-29 5.4.3 master-slave 5-33 6 616-12 6.1 62 6.1.1 62 TM 63 6.1.2 MR Configurator2 6.2 64 6.2.1 64 6.2.2 65 6.2.3 66

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

25

PB1013A/Air-operated type without foot 37 mm 52 mm 37 mm 52 mm 66 mm 66 mm Application Examples Application Examples Space saving (Air operated) Printing machine Semiconductor/ LCD equipment Analyzer for medical and biochemistry Car washing machine Ink/solutions supply DI water/solutions supply, Waste fluid collection Water/ detergents supply Reagents supply Machine tool Cleaning device Devices

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

MXU

52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

MY1

Applicable O-ring WX S Y Bore size (mm) 50 63 8 9 74 92 18 18 C15 C15 1356 MY1W Series Mechanically Jointed Rodless Cylinder With Protective Cover Stroke Adjusting Unit With adjusting bolt MY1W Bore size Stroke A h E EA EB W Stroke adjusting unit h TT MY1W50/63 MY1B MY1H EC EY MY1B MY1M E 14.6 20 24 29 35 40 52 EA 7 10 12 14 17 20 26 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 EY

Vacuum

:Pr66 l*o' $en Flow characlerislics: at 4 5 kgf-cm'?

Applicable Auto Switch Model

color 2 color 2 color 2 color 2 color 2 color 5.3-9 5.3-11 5.3-10 5.3-25 5.3-12 5.3-13 5.3-18 5.3-14 5.3-15 5.3-16 5.3-26 5.3-17 5.3-27 5.3-19/5.3-20 5.3-21/5.3-22 5.3-24 5.3-23 5.3-29 5.3-31 5.3-55 5.3-49/5.3-50 5.3-42 5.3-30 5.3-56 5.3-51 5.3-59 5.3-43 5.3-32 5.3-33 5.3-34 5.3-36 5.3-52/5.3-53 5.3-57 5.3-35 5.3-60 5.3-44/5.3-45 5.3-37 5.3-58 5.3-46 5.3-54/5.3-65 5.3-61 5.3-38 5.3-39 5.3-66

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23mm2 < >: AC 61 53.5 35.5 0 1 M plug connector (M): VQZ312 (R)wMwC6, C8, C10, 02 Cover diameter 1.5 Cross section 0.23mm2 77 37 <42> 300 (Lead wire) 101.5 <102.5> 114 65 <66> Indicator light < >: AC 1.12-15 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 2 position double 0 1 Grommet (G): VQZ322 (R)wGwC6, C8, C10, 02 300

%silltr

66 66 66 67 67 68 68 69 69 91 91 ol 91 o, 92 93 94 94 94 95 96 96 96 96 97 97 98 98 98 99 oo 101 1 0 1 101 101 102 103 104 104 104 105 8 BAS|C CIBCUITS lntroduction Flow Amplilication Signal Inversion Selec{ion Memory Function Time tunctions Delayed switching on Delayed switching otf Pulse on switching on Pulse on releasing a valve Cylinder Control Manual Control Single Acting Cylinder Direct

Vacuum

:Pr66 l*o' $eni Flow characlerislics: at 4 5 kgf-cm'?

CJP

(g) Bore size (mm) Part Bore size (mm) 6 Stroke Mounting 6 10 15 10 15 Symbol Specifications Auto switch D-90, D-97, D-90A, D-93A 5 44 60 99 -XA Change of rod end shape Heat resistant cylinder (150C) -XB6 10 50 66 108 Single knuckle joint Basic weight Bracket I-P006 I-P010 I-P015 -XB7 Cold resistant cylinder 15 56 73 118 -XB9 Low speed cylinder (10 to 50 mm/s) 20 62 79 127 Double knuckle

Cylinder

. -/---[-~ 6 50(61) 66(77) 10811 19) 10 OUT 0.85 ~.98 Series CJP 118(129) 15 Stroke 56(67~+ 73(84) [-'t-Id~K95 . 4.12 Nosemount lO ~ (mm) 62(73) 79(90) 127(138) 20 OUT 2.36 3.93 5.50 93(104) 148(159) 25 I I 15 92(103) 146(157) 8.84 1,2.37 OUT 5.30 30 .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 3 1 4 6.5 depth 3.4 4 3.4 105 RB0805X552 CY1F25 CY1F25 +0.012 0 Rc1/8 NPT1/8

Low Profile Guide Type

53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4 RB0805X552 CY1F25 CY1F25 +0.012 0 -X Rc 1/8 1

15

10.5 16.5 11.5 5.4 12 5 40 39 11 28 2 6 60 5.8 8 5.5 CY1F CY1SG20-Z 10 9.5 21.6 44 8.5 62 36 37.5 24 19 20 M6 x 1 M6 x 1 10.5 22 17 5.4 16 2 5.5 8 46 45 16 70 5.8 28 5.5 10 CY1SG25-Z M6 x 1 M6 x 1 10 11 26.4 52 8.5 70 40.5 40.5 27.5 21.5 21 12.5 22 17 6.5 16 2 5.5 8 54 53 20 70 49 7.5 7 10 CYP CY1SG32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 86 50 50 33 26 24 11.5 23.5 17.5 8.6 20 5.5 66