Vacuum

:Pr66 l*o' $en Flow characlerislics: at 4 5 kgf-cm'?

Applicable Auto Switch Model

color 2 color 2 color 2 color 2 color 2 color 5.3-9 5.3-11 5.3-10 5.3-25 5.3-12 5.3-13 5.3-18 5.3-14 5.3-15 5.3-16 5.3-26 5.3-17 5.3-27 5.3-19/5.3-20 5.3-21/5.3-22 5.3-24 5.3-23 5.3-29 5.3-31 5.3-55 5.3-49/5.3-50 5.3-42 5.3-30 5.3-56 5.3-51 5.3-59 5.3-43 5.3-32 5.3-33 5.3-34 5.3-36 5.3-52/5.3-53 5.3-57 5.3-35 5.3-60 5.3-44/5.3-45 5.3-37 5.3-58 5.3-46 5.3-54/5.3-65 5.3-61 5.3-38 5.3-39 5.3-66

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23mm2 < >: AC 61 53.5 35.5 0 1 M plug connector (M): VQZ312 (R)wMwC6, C8, C10, 02 Cover diameter 1.5 Cross section 0.23mm2 77 37 <42> 300 (Lead wire) 101.5 <102.5> 114 65 <66> Indicator light < >: AC 1.12-15 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 2 position double 0 1 Grommet (G): VQZ322 (R)wGwC6, C8, C10, 02 300

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66 66 66 67 67 68 68 69 69 91 91 ol 91 o, 92 93 94 94 94 95 96 96 96 96 97 97 98 98 98 99 oo 101 1 0 1 101 101 102 103 104 104 104 105 8 BAS|C CIBCUITS lntroduction Flow Amplilication Signal Inversion Selec{ion Memory Function Time tunctions Delayed switching on Delayed switching otf Pulse on switching on Pulse on releasing a valve Cylinder Control Manual Control Single Acting Cylinder Direct

Vacuum

:Pr66 l*o' $eni Flow characlerislics: at 4 5 kgf-cm'?

CJP

(g) Bore size (mm) Part Bore size (mm) 6 Stroke Mounting 6 10 15 10 15 Symbol Specifications Auto switch D-90, D-97, D-90A, D-93A 5 44 60 99 -XA Change of rod end shape Heat resistant cylinder (150C) -XB6 10 50 66 108 Single knuckle joint Basic weight Bracket I-P006 I-P010 I-P015 -XB7 Cold resistant cylinder 15 56 73 118 -XB9 Low speed cylinder (10 to 50 mm/s) 20 62 79 127 Double knuckle

Cylinder

. -/---[-~ 6 50(61) 66(77) 10811 19) 10 OUT 0.85 ~.98 Series CJP 118(129) 15 Stroke 56(67~+ 73(84) [-'t-Id~K95 . 4.12 Nosemount lO ~ (mm) 62(73) 79(90) 127(138) 20 OUT 2.36 3.93 5.50 93(104) 148(159) 25 I I 15 92(103) 146(157) 8.84 1,2.37 OUT 5.30 30 .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 3 1 4 6.5 depth 3.4 4 3.4 105 RB0805X552 CY1F25 CY1F25 +0.012 0 Rc1/8 NPT1/8

Low Profile Guide Type

53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4 RB0805X552 CY1F25 CY1F25 +0.012 0 -X Rc 1/8 1

15

10.5 16.5 11.5 5.4 12 5 40 39 11 28 2 6 60 5.8 8 5.5 CY1F CY1SG20-Z 10 9.5 21.6 44 8.5 62 36 37.5 24 19 20 M6 x 1 M6 x 1 10.5 22 17 5.4 16 2 5.5 8 46 45 16 70 5.8 28 5.5 10 CY1SG25-Z M6 x 1 M6 x 1 10 11 26.4 52 8.5 70 40.5 40.5 27.5 21.5 21 12.5 22 17 6.5 16 2 5.5 8 54 53 20 70 49 7.5 7 10 CYP CY1SG32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 86 50 50 33 26 24 11.5 23.5 17.5 8.6 20 5.5 66

3 Port Air Operated Valve

VP300-224-1 (M3 x 36) VP500-224-1 (M4 x 46) VP700-224-1 (M5 x 66) Thread type Series For valve mounting 3 5 7 VPA344 VPA544 VPA744 Nil F N T Rc G NPT NPTF Caution Tightening Torque of Mounting Screw Port size Symbol 1 2 VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm 1565 VPA300/500/700 Series VPA300 Series/Base Mounted/Dimensions Standard/VPA344-101 02 A B

1

72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G

Compact and Lightweight

Body ported ZM Vacuum pressure reached ZL S 90 kPa L 48 kPa (ZH05 to 13DA) 66 kPa (ZH15 to 20DA) ZH ZH ZH Port (SUP./VAC./EXH.) size Note) Silencer can only be selected for EXH. port with One-touch fitting. The silencer part number depends on the size of the EXH. port.

Series HAW Water Cooled Aftercooler 1

66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1

Auto Switch Guide

with Diagnostic Output P. 10-20-50 Band, Rail, Tie-rod Mounting Water Resistant 2-color Indication Type P. 10-20-54 Band, Rail, Tie-rod, Direct Mounting With Timer P. 10-20-60 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 10-20-64 Rail Mounting Wide Range Detection Type P. 10-20-65 Band Mounting Made to Order Specifications P. 10-20-66

RHC

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-6-6 6 High Power Cylinder Series RHC Specifications Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.05 MPa 10 to 60C (No freezing) Ambient and fluid temperature Piston speed 50 to 3000 mm/s RE A B Cushion Air cushion REC Lubrication Not required (Non-lube) Thread