Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

High Vacuum L Type Valve

Note 2 The valve for vacuum has vacuum grease (fluorine type: Y-VAC3). Model Starting Holding Power(W) Current(A) Power(W) Current(A) *G/C/D/T , P5G 36 1.5 4.8 0.38 P1G 50Hz 30.5 0.47 14.8 0.35 XLS-1660Hz 10 0.27 P2G 50Hz 30 0.24 4.9 0.11 60Hz 2.3 0.10 *G/C/D/T , P5G 47 2.0 5.3 0.5 P1G 50Hz 42 0.62 20 0.46 XLS-2560Hz 13.5 0.36 P2G 50Hz 45 0.35 6.7 0.15 60Hz 3.0 0.12 7 XL*-OMI0013-B 4.

CU

4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

Digital Flow Monitor

Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 80 Hysteresis (H) 30 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 30 L/min) Switch ON point 80 L/min or more Switch OFF point Below 50 L/min Change the zero cut-off setting. The set value (P) and hysteresis (H) cannot be changed.

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

(With indicator light: 1.1) Power consumption (W) DC 2 2 0.78 (With indicator light: 0.81) 100V 110V [115V] 0.86 (With indicator light: 0.89) 0.94 (With indicator light: 0.97) Apparent power (VA) AC 1.18 (With indicator light: 1.22) 200V 3 1 3 1 1.30 (With indicator light: 1.34) [1.42 (With indicator light: 1.46)] 220V [230V] Refer to page 647.

DOC1023125

D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t . Alterations made to this product may lead to a loss of durability and damage to the product, which can lead to human injury and damage to other equipment and machinery.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. 3 SCREEN HI PRECISION DIG PRESS SWITCH. N59. 51.00000 lb. PRESSURE SWITCH, ISE1-6.

Push Type, Vacuum Pressure Sensor: D (Digital Vacuum Pressure Switch), Output Specifications: Y (PNP Open Collector 2 Outputs + Copy function), Unit Specifications: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan), Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

NCX2 seies

D-F7BV D-F7BAL, D-J79W D.A72,D-A72H B i r w n l 8 t u w n (Black) D.F7PW D-E80A D-E73A (Black) o Reed swil.h Beed swltch o e Brue :Ei*" lblack) ked) D.A76H. D-E75A (+) E | 'FesisLort Black ;fi-+4--lrl" (-) o Series NCX2 6.14 10.14 Aub sr.

Push Type, Vacuum Pressure Sensor: D (Digital Vacuum Pressure Switch), Output Specifications: Y (PNP Open Collector 2 Outputs + Copy function), Unit Specifications: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan), Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Stations: 02 (2 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Guide Table Series MGF ø40, ø63, ø100 1

Operating pressure: P (MPa) 3. Weight of total loads: Wo (kg) Wo = (Load weight: WA) + (Jig weight: WB) 4.

IZS30_eng

Installation distance and static charge elimination time Installation distance and static charge elimination time (W/O air purge) Operation frequency (w/o sensor)33Hz Static charge elimination time sec W/O sensor With sensor Targets static charge work Charged plate dimensions:150150mm Capacity:20 @ F Mean.Cond.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Counter/Extension Cable

or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

s2 in X, Y, Z directions, 3 times each (De-energized)?