Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.
ALF400 to 900, ALT-5/-9 Series Operating Pressure Range Tank and line pressure How to Order
0 Semi-standard (option) ID200 Basic size Description Bracket Symbol Nil B Z 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04 06 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200
Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02
Af t er set t i ng t he sw i t ch, t i ght en t he sw i t ch cover i n t he reverse order of t he above procedure. ( Ti ght eni ng t orque 0. 6 t o 0. 8N m ) Setting of node address and com m unication rate Pl ease execut e t he set t i ng of node address and t ransm i ssi on rat e w i t h t he di p sw i t ch. 1 2 3 4 5 6 7 8 9 10 SW 40 SW 20 SW 10 SW 08 SW 04 SW 02 SW 01 BS4 BS2 BS1 Tabl
(L) N02(L) F02(L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D
(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations
0 Semi-standard (option) ID200 Basic size Symbol Nil B Z Description Bracket 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage Thread type 20 30 40 60 Symbol Description 02 04 06 1 4 1 2 3 4 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200
AP100-02 500 Relief flow {l/min (ANR)} Dimensions 400 28 300 Panel cut dimensions 200 100 + 0 K P C U O 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 S L H 32.5 Set pressure (MPa) Note) The graph above shows the relief flow when the set pressure rises and falls from 0.1 MPa. 30 1.6 41 8.5 6.5 10 (69) 45.5 OUT IN 20 40 2 x 1/8, 1/4 40 758
Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 5 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)
Series: 3 (JSY3000), Type: 40 (Side Ported), Valve Stations: 5 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)
Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)
Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)
Series: 3 (JSY3000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)
Series: 3 (JSY3000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: D (D Side), A,B Port Size: M5 (M5 x 0.8)
Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: U (U Side), A,B Port Size: M5 (M5 x 0.8)
Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 8 Stations, P,E Port Entry: U (U Side), A,B Port Size: M5 (M5 x 0.8)
Series: 3 (JSY3000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: B (Both Sides), A,B Port Size: M5 (M5 x 0.8)
Series: 3 (JSY3000), Type: 40 (Side Ported), Valve Stations: 6 Stations, P,E Port Entry: B (Both Sides), A,B Port Size: M5 (M5 x 0.8)