ITVH

Self-diagnosis: 5% F.S. or less Linearity 1% F.S. or less Hysteresis 1% F.S. or less Repeatability 1% F.S. or less Sensitivity 1% F.S. or less Temperature characteristics 0.12% F.S. or less/C Output pressure display Accuracy 2% F.S. or less 1 digit 2 Output pressure [MPa] This range is outside of the control (output). 0.2 MPa Minimum unit Note 4) MPa: 0.01, kgf/cm2: 0.1, bar: 0.1, psi: 1

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

SI unit (CC-Link compatible)

Cable with power supply connector Part number: EX9-AC0 1 0-1 Cable length (L) 1 1000 [mm] 3 3000 [mm] 5 5000 [mm] Item Specifications Pin No.

3 Port Air Operated Valve Series SYJA300 1

Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

Directional Control Driver for Electric Cylinder

Back page 6 Directional Control Driver Precautions 4 Be sure to read this before handling. Caution on Design and Operation 1.

AMP

7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VP3145-OMH0005

(Refer to page 8.) 1) If a lubricant is used in the system, use class 1 turbine oil (no additive), ISO VG32. Warning 1/8 35 3/8 1520 1/2 2025 3/4 2830 1 3638 1 1/4 4042 1 1/2 4850 2 4850 Follow the procedure of the manufacturer when fittings other than SMC is used. 1) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.

AMPSeries

7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Pressure Gauge Guide

molybdenum coated Aluminum die-casted Black disulfide molybdenum coated 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.5 8 1 R Back side thread Cover ring assembly G46 4 1 R Page 14-11-6 Polycarbonate MPa 42.5 3 Rolled steel Black melamine painted Brass Vertical side thread 8 1 R GA46 4 1 R 0 to 0.2 0 to 0.3 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 Back side thread G33 30 8 1 R Page 14-11-8 Vertical

Exhaust Cleaner for Clean Rooms AMP Series

7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMD

160 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMD250 1 2 3 8 1 2 , AMD350 3 4 1 2 3 4 , AMD450 1 1 1 1 AMD550 AMD650 3 4 1 2 , , 14-20-26 6 Micro Mist Separator Series AMD AMD850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering, Inc.-230

PS-OMH0005CN

-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2

Precision Regulator

IR-OM00015 PRODUCT NAME Precision Regulator MODEL / Series / Product Number IR300(0, 1, 2)-A IR301(0, 1, 2)-A IR302(0, 1, 2)-A Contents Safety Instructions 2 to 6 1. Application 7 2. Specifications 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8.

AMF

8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series AMF Dimensions AMF450 to AMF850 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

AL800/900

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5

AFF

AFF4B 1 2 3 8 1 2 , AFF8B 3 4 1 2 3 4 , AFF11B 1 1 1 1 AFF22B AFF37B 3 4 1 2 , , 14-20-13 6 Series AFF Dimensions AFF75B Accessory D: With auto-drain (N.O.) for AFF75B 3/8B female thread Option Bracket (Option) T: With element service indicator Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8 1 2 , AMG350 3 4 1 2 3 4 , AMG450 1 1 1 1 AMG550 AMG650 3 4 1 2 , , 14-20-6 5 Water Separator Series AMG Dimensions

EX245-FPS1_2_3_eng

voltage 500 VAC 1 min.

VND

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D