CLQ

5 !

0.5

Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (

IDX-OM-U021

1 2 IN OUT INOUT () 424 IDF100150F 5-1 5 2 IDX-OM-U021 5 5-2 1-3 51 3.6 OFF () ON OFF ON IDF100150F 5-2 5 3 IDX-OM-U021 5 5-3 R OFF OFF OFF ON ON () IDF100150F 5-3 R 5 4 IDX-OM-U021 6 6 6-1 IDF100F-30IDF125F-30IDF150F-30560 MPa 0.151.0 / K 0.151.6 () 245 (85%) 50Hz 16 20.1 25 (ANR) 1) 60Hz 18.8 23.7 30 3/min m 50Hz 16.7 20.9 26 2) 60Hz 19.6 24.7 31.2 MPa 0.7

PSxx-OMT0001CN

DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A CF G1/8 ISA-12-C -11No.PS-OMT0001CN-E 2 ISA-21ISA-20 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 30PSI0.2MPa PSI 2 0.4MPa 0.2MPa 0.4MPa 0.2MPa MPa MPa/PSI 2 11/8 2SI -12No.PS-OMT0001CN-E

VQ4000

B VQZ100-47-B 1.11-3 Series VQ4000 Base Mounted Valve Plug-in, Plug Lead/Single Unit Model (1) Response time ms(2) Weight (kg) (3) Model Effective area (mm2) (Cv) Series Configuration Standard: 1W Low wattage and AC 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 22 or less 20 or less Metal seal 36.0 (2.0) Single VQ41 0 0.23 (0.29) 2 position 3 position 27 or less 25 or less Rubber seal 39.6 (2.2

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Locked condition Released condition 8-21-5 5 Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

LFE-OMY0008

100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] 2 2 2 2 5 5 5 5 [F30] 2 5 OFF OFF 2 5 B OFF OFF OFF OFF 47 No.LFE*-OMY0008 [F32] () 1. 1. 1. 1.

3 Port Solenoid Valve/

release valve X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve with soft start-up function X555 VP 4 1 5 4 5 D Z 03 M Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (The scattering of the indicated value can be eliminated.) 5% R.D.

Multi-Axis Step Motor Controller

5 !6 No.

Industrial Filters

N.C. and N.O. common Noninductive load (A) Inductive load (A) Resistance load Light load Inductive load Motor load Rated voltage (V) Normally Normally Normally Normally Normally Normally Normally Normally closed open closed open closed open closed open AC125 AC250 DC8 DC14 DC30 DC125 DC250 5 5 5 5 5 0.4 0.3 1.5 1 0.7 0.5 4 4 2.5 1.5 1.3 0.8 3 3 3 0.1 0.05 3 3 3 0.1 0.05 5 4 Reset button 4

DOC1003626

. 807Eh 2 3 Perform (6) for the 2nd value (0006h) and then, perform (5). 2280h 4 Perform (6) for the 3rd value (0h) and then, perform (5).

3 Port Solenoid Valve Series SYJ300/500/700

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

VQ 0 0 5 2 1 Y Flat cable kit with terminal block VV5Q11-08C6G0 ... 1 set Manifold base part number VQ1100-5 ... 4 sets Valve part number (stations 1 to 4) VQ1200-5 ... 1 set Valve part number (station 5) VQ1300-5 ... 3 sets Valve part number (stations 6 to 8) Series Manual override Symbol Manual override Non-locking push type (tool required) Slotted locking type Knob locking