SMC Corporation of America
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Cable size Crimped terminal on the rated current thermo-chiller side HRS100-Al-20-l HRS100-Wl-20-l 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 30 A M5 HRS150-Al-20-l HRS150-Wl-20-l 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-Al-40-l HRS100-Wl-40-l 3-phase 380 to

Enable Generates an error. 1 -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. 2 Analogue input range (Range) Selects the analogue input range. -10..10 V 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit. 2s complement 2s complement.

AR4 5 AR6 5 AR8 5 AR9 5 Description Model B24P B25P Bracket Pressure gauge with limit indicator Note 1) B24P B25P G46-1002 (Max. 1.0 MPa), G46-202 (Max. 0.2 MPa) Note 1) In the gauge part no. (e.g. G46-1002), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 17 Rotary Table Series MSQ Dimensions/Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type/MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA depth of counter bore JB 22.5 BE WF 2-M5 x 0.8 Piping port (Plugged) BD Effective depth FB

AR4 5 AR6 5 AR8 5 AR9 5 Description Model B24P B25P Bracket Pressure gauge with limit indicator Note 1) B24P B25P G46-1002 (Max. 1.0 MPa), G46-202 (Max. 0.2 MPa) Note 1) In the gauge part no. (e.g. G46-1002), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.

9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

(5), Bottom Ports (5) 05 = Mounted oo Individual Subplate 1'NPTFSidsPorts(5) 06 = Mounted on lndividual Subplate 3/4" NPTF Side Ports (5) DIRECTIO}IAL AIR VALVES DIMENSIONS/PARTS LIST NVS424, NVS *u, orro, 41.*,41M t!.

port) . 4 1 4. 2. 2 Maintenance of auto drain . 4 1 4. 2. 3 Maintenance of timer type solenoid valve with auto drain (Option V) . 4 4 4. 2. 4 Maintenance of operating time accumulator . 4 4 Chapter 5 Troubleshooting 5 . 1 Troubleshooting . 5 1 5 . 2 Reset of protective equipment . 5 3 5 . 3 Reset of ground fault circuit interrupter (Option R) . 5 4 Chapter 6 References 6 . 1 Specification

output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

5 5 5.5 5.5 Operating range Note) Operating range Note) Perpendicular electrical entry is not available for 50 and 63.

5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !