Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (relief type), Port

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (relief type), Port

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (relief type), Port

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (relief type), Port

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (relief type), Port

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

Exhaust Cleaner Series AMC

1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E5G

EX500-GEN2_eng

IP65 Enclosure rating 8 8 2 8 2 2 3 3 7 7 3 7 Operation: -10 to 50 oC, Storage: -20 to 60 oC (No condensation or freezing) Ambient temperature range 4 4 6 4 6 6 1 2 3 4 5 5 5 Operation, Storage: 35 to 85%RH (No condensation) Operating humidity range L IP address No corrosive gas Operating atmosphere 48 52 Setting 550 g Weight Description After maintenance is complete, perform appropriate

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

AMR3000 to 6000

AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103 121 131 161 51 61 66 81 28 37 37 44 32 40 48 56 3.2 3.2 4.5 4.5 37 37 42 42 21.5 18 16 18.5 182 215 281 325 144 166 188 230 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter assembly installation procedure Accessory/Compact pressure switch: IS1000-01 (Refer to page 3.10-1 for further information

IDX-OM-U021

) 4 5Nm IDF-S1758 1 IDF100150F 4-2 4 3 IDX-OM-U021 4 4-2-3 V ON ON OFF 2 3 4 6 1 2 4 8 5 10 0.5 ON:SEC OFF:MIN 0.5 4-2-4 7 25 Y92S-36/CR2477/ 0 MEMO h (h) IDF100150F 4-2 4 4 IDX-OM-U021 4 , OFF [] IDF100150F 4-2 4 5 IDX-OM-U021 4 (+,-) 0 IDF100150F 4-2 4 6 IDX-OM-U021 5 5 5-1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDF100150F 5-1 5 1 IDX-OM-U021

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

As a rule, replace the element when the pressure drops by 0.02 MPa. 2. During disassembly and assembly, confirm that there are no scratches or damage, etc, on the O-ring. 13-10-10

LFE-OMZ0012

contact parts PPS, FKM, Brass Port size 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) Weight(Body) *5 Approx.

rep-filter-e

Cylinder Hexagon socket head cap screw (4-M8 x L20) Cylinder flange Joint1 Strut (4-M10 x L22) Mounting bracket2 IN OUT Note) 1, 2: Jointed part Hexagon socket head cap screws (2-M4 x L6) Protection cover IN DRAIN Fig. 1 Fig. 2 Mounting bracket set screw Cover assembly Cover assembly Element assembly Guide assembly Screw (M3) Element FN111-10 FN112-10 FN111-10 FN112-10 Fig. 4 Fig. 3 484 Series

Industrial Filters Replacement Procedure

Cylinder Hexagon socket head cap screw (4-M8 x L20) Cylinder flange Joint1 Strut (4-M10 x L22) Mounting bracket2 IN OUT Note) 1, 2: Jointed part Hexagon socket head cap screws (2-M4 x L6) Protection cover IN DRAIN Fig. 1 Fig. 2 Mounting bracket set screw Cover assembly Cover assembly Element assembly Guide assembly Screw (M3) Element FN111-10 FN112-10 FN111-10 FN112-10 Fig. 4 Fig. 3 484 Series

CNS

Graph (1) 30 20 10 2.

IDX-OM-X004

/ Compliance Requirements . i 5 Chapter 1 Name of each Parts 1 1 Name of each Parts . 1 1 Chapter 2 Transportation / Installation 2 1 Transportation . 2 1 2 2 Installation . 2 1 2 2 1 Location . 2 1 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Electric wiring . 2 3 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation

IIIIIII

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Mechanical Valves Series NVM, NVFM, NVZNI

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Clean Exhaust Filter

Criteria of the products life The service life of the product ends when either of the following two conditions occurs. 1) After 2 years of usage has elapsed. 2) When the back pressure of the SFE reaches 0.1 MPa even though the operating period has been less than 2 years. 3) When the system fails to operate normally due to clogging. 3.