ATEX Compliant 5 Port Solenoid Valve Series 52-SY

2 4 1/8 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" 1/4 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 5/16" One-touch fitting for 3/8" 1/4 3/8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 One-touch fitting for 5/16" One-touch

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at extension end) (Insert) Stroke adjuster at extension end KA 25 12 25 6.5 K NA x M6 x 1 thread depth 6.5 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 15 14 14 8 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 15 Operating port 2 x Rc, G, NPT1/8 13 3 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 6.5 5H9 ( ) depth 5 +0.030 0 HA GA NN x M6 x 1 thread depth 12 6

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

e

Heavy load Standard load Medium load Light load [mm/s] Switch and Speed Note 1) Switch and Acceleration Note 2) [m/s2] Nominal size Low speed Medium speed Standard speed 16 25 E-MY2BH1612 Stroke 1 2 3 4 5 6 7 8 9 10 10 20 30 40 50 75 100 300 500 1000 50 75 100 125 150 200 250 300 500 1000 100 200 300 400 500 600 700 800 900 1000 1 2 3 4 5 6 7 8 9 10 0.25 0.49 0.74 0.98 1.23 1.47 1.72 1.96

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

+ Nil N F Type of actuation =$ 1 2 $ $ & 4 !8 % $ $' Manual override Nil9 + 3 $ $ B9 1 3 $ 5 * Body option 09 ) $ Rated voltage / "28 : ;7 "28 : ;7 // "28 : ;7 "28 : ;7 "<8 / "<8 = 1 2 3 C9 1 3 $ 8 5!* Light/Surge voltage suppressor : $$ $$ : $$ Nil S Z * 4 R port P/E port 5 6 39 !: ) $ * >0? >;0? ><=0? &' 9 Electrical entry =$ 1 $ !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

CE

2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Stainless steel 15 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

0 Fitting (P port) Note 8) !1 Fitting (PS / PV port) Note 8) Symbol Object spec. Applicable tubing O.D. Part no. Part no. Applicable tubing O.D.

EXxx-OMU0020CN

LED 4M12 (5 ) . 8-1 EX245-DY1 56 No.EX-OMU0020CN 8.2. . 8-1 EX245-DY1 (WLH) mm 5412061 280 g PBT DC24 V SI US2 1.6 V 50 mA 4 x M12 5 (2 /) 0.5 A / 1 2 A / 1 1 8 PNP 57 No.EX-OMU0020CN 8.3. M12 5 . 8-2 EX245-DY1 TOP View 1 N.C. 2 2 n+1 3 5 1 3 0 V ( / ) 4 4 ( n) 5 FE/ SI IP65 IP65 8.4.

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

Step Motor Controller (Servo / 24 VDC)

number and the combination of IN0-IN5 or OUT0-OUT5. 0 OFF 1 ON 0 OFF 1 ON No IN5 IN4 IN3 IN2 IN1 IN0 Step Step OUT OUT OUT OUT OUT OUT No 5 4 3 2 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 0 0 0 1 2 0 0 0 0 1 0 2 0 0 0 0 1 0 3 0 0 0 0 1 1 3 0 0 0 0 1 1 4 0 0 0 1 0 0 4 0 0 0 1 0 0 5 0 0 0 1 0 1 5 0 0 0 1 0 1 6 0 0 0 1 1 0 6 0 0 0 1 1 0 7 0 0 0 1 1 1 7 0 0 0 1 1 1 8 0 0 1 0 0 0 8

KB

Tube size/ Connecting thread size Body size KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 R(PT) 1 8 Male connector socket: KBB Female connector socket: KBS Part No. T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT)1 4 Rc(PT)1 8 M6 X 1 M5 X 0.8 T Connecting thread Part No.

Cylinder

20 8 29 5.5 24 1 9 8 28 131.7 1 6 1 25 L. 15 Series CJP Accessories Single Knllckle Joint : Pliluble l

HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

MY2

8#8!9@0 !3 MY2C16 @9 %6 !4 #1@3@9 !5@8 @7 %5!

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

AR Series Modular Type Regulator

17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5 45.5 22.5 7 AR40-A 1/4, 3/8, 1/2 1/8 70 100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70 2.3 38.4 52.5 26 7 AR40-06-A 3/4 1/8 75 101.5 33.5 34.5 M52 x 1.5 34.5

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !