Heat Resistant 2-Color Indicator

Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto switch (Sensor section) 16 to 25 Indicator light A 17.5 B [mm] Auto switch model Bore size D-M9 J A B U 16 9.5 7 21 20 9.5 8.5 23.5 25 9.5 9 27 32 11 8 29 40 15 10.5 31 50 13 13.5 36 63 15.5 16.5 41.5 22 U 64.5 4 Auto switch (Amplifier section) 32 to 63 A 17.5 B U Note) Adjust the auto switch after

Manifold Regulator ARM1000/2000 Series

Description Material ARM1000 ARM2000 134819-30#1 13615 13614 KA00347 16.5 x 13.5 x 1.5 KA00476 JIS B 2401 P7 (Initial setting) Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 10 L/min (ANR) 7 8 9 13626-30#1 13625 13624 KA00361 23 x 20 x 1.5 KA00087 JIS B 2401 P8 Valve Valve spring Valve guide Brass, HNBR Stainless steel Polyacetal 10 O-ring NBR Initial set point 11 O-ring NBR

Flame Resistant

Description Material Note 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Needle Brass Electroless nickel plating 4 Seat ring Brass Electroless nickel plating 5 Spring Steel wire 6 U-seal HNBR 7 O-ring NBR 8 O-ring NBR 9 Cassette 10 Seal NBR 11 Spacer Brass Electroless nickel plating 12 C-ring Steel wire 13 Gasket NBR/Stainless steel Flow rate [L/min(ANR)] Flow rate [L/min(ANR)]

1

type Compact cylinder with auto switch Series CDQS 20-CDQS Standard type 20-CDQS Standard long stroke type (Note 2, 3) 20-CDQSW Double rod type 20-CDQSS Anti-lateral load type Air cylinder Series C(D)M2 20-CM2 Standard type 20-CM2A Standard with air cushion type 20-CM2W Double rod type 20-CM2K Non-rotating rod type 20-CM2R Direct mount type 20-CBM2 End lock type Air cylinder Series M(D)B

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate, w/o Station Number)

Number), DIN Rail Option: 11

Number), DIN Rail Option: 11

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: C (JXC, Step Motor

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 500mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: C (JXC, Step Motor

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 500mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 8 (8m)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller Type: C

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, LA, VNA/B/C/D

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, JA, VNA/B/C/D

EX250-SEN_eng

B. Single power supply M4 x 4 Thickness: 13.2 Refer to the operation manual from SMC website (URL http://www.smcworld.com) for more information about dimensions.

XLJ- -*G1 Series 25 40

Construction and Outer dimensions 1 Atm , vent port Bonnet assembly (maintenance part) (inc. each part excluding body, external seal and accessory) Bonnet (material A6063) 6 External seal (maintenance part) 3 Vacuum pump side Valve seal (maintenance part) 2 Valve (material SUS304) 5 Body (material A6063) 4 Chamber side E C A A B D Dimensions [mm] Model A B C D E XLJ-25 50 139 111 48 44 (54

FGX-OM-L011

V V O (a) V (b) V (c) 6 8/8 FGX-OM-L011 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

FILTER REGULATOR

Drawing 11 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Pressure Sensor

Applicable fitting size (D) PSE53-R06 6 mm PSE53-R07 1/4 inch With sensor cable -14No.PS-OME0004-G Revision history A: For B: Change template. C: Complete revision. D: Modified errors in text. E: Measurement laws are added. F: Modified errors in text. [October 2017] G: Contents revised in several places.

Liquid Dispense Pump (solenoid type)

Doc. no.LV10***-OMS0002-B PRODUCT NAME Liquid Dispense Pump (solenoid type) MODEL / Series / Product Number Series LSP Contents Index Feature, Application Example 1 How To Order 2 Specifications 2 Construction 3 Dimensions 4-5 Specific Product Precautions 1 6 Specific Product Precautions 2 7 Specific Product Precautions 3 8 Safety Instructions 9 Countermeasures 10-12 1 2 3 4 5 6 7 8 9 The