Series VS

, 2 SU0 No option 04 1/2 Size 1, 2 SUQW DeviceNet serial interface (Note) 06 3/4 Size 2, 3 10 1 Size 3 TU1 Terminal Box Note: Please ask available protocol to SMC Conduit Port Thread (for terminal box only) Symbol Port Thread NIL Rc (PT) F G (PF) N NPT T NPTF Locations and sizes of port 4(A), 2(B) Symbol Port location Applicable ISO size 02 Side 1/4 Size 1 03 Side 3/8 Size 1, 2 04 Side

Air Suction Filter ZFA Series

Symbol Thread type B 1 8 1 4 ZFA200 ZFA100 Nil T Rc B NPTF F G ZFA200 How to Order Manifold (2 to 10 stations) Symbol Indicate both the symbols for air suction filter and bracket part no.

Compact Pad

Symbol) Pad type U (Flat) UM (Flat with groove) B (Bellows) 015 # 02 # 035 # 04 06 08 10 13 16 # # # # # # # # # # # # Sales unit 1.5 to 8 : 10 pcs. 10 to 16 : 5 pcs.

Stations: 4 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 3 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 06 (Side 3/4), SI Unit: 0 (w/o SI Unit), P, R Port Size: 06 (3/4), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 2 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Rotary Cylinder Series MRQ

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

HEC_001W-E

S t o p B i t M O D E < 1 B i t 7.6.4Power supply OFF The power switch is turned off. When the power supply is restarted after turned off once, keep time interval at least 3sec.

,

2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other

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2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other

Rodless Cylinder for Vacuum Series CYV ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other

Rodless Cylinder for Vacuum Series CYV ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

Compact Cylinder with Solenoid Valve/

W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 [ ]: Values for 5 mm stroke with 32 < >: Values for

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis of cylinder Dynamic Moment

Compact End Lock Cylinder Series CBQ2

+ Stroke L J E Bore size (mm) HN (Max.)

PF-OMN0011_C

8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4