EXxx-OMN0027CN

0 Byte 7 Bit No. 0 1 1 1 2 1 3 1 4 1 5 1 6 1 7 1 System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No. 0 1 1 1 2 Reserved 3 1() 4 1() 5 Reserved 6 1 7 1 -73No.EX-OMN0027CN-D System diag.3 7 6 5 4 3 2 1 0 Byte 9 Bit No. 07 Reserved System diag.4 7 6 5 4 3 2 1 0 Byte 10 Bit No. 0 1 1 1 2 1 3 1 4 1SI 5 Reserved 6 Reserved 7 Reserved -74No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 19 0 1 0 0 1

Fieldbus system CC-Link compatible SI unit

I0 O15..O0 0 AI0 AO0 Station I15..I0 O15..O0 0 AO0 System + unit diagnosis AO2 1 1 AI1 AO1 1 1 AO1 1st division 2 AI2 AO2 2 3 AI3 AO3 3 AI0 AO3 Station I31..I16 O31..O16 0 AI4 AO4 Station I31..I16 O31..O16 0 AI1 AO4 2 I47..I32 O47..O32 1 AI5 AO5 2 I47..I32 O47..O32 1 AI2 AO5 2 AI6 AO6 2 AI3 AO6 3 AI7 AO7 3 AI4 AO7 Station I63..I48 O63..O48 0 AI8 AO8 Station I63..I48 O63..O48 0 AI5 AO8 1 1

Air Cylinder NCQ7 Series Compact Cylinder

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm2 Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection thread R Weight g M L2 D2 L1 2-Applicable tubing M L1 M KPT04-01 KPT04-02 KPT06-01 KPT06-02 KPT08-01 KPT08-02 KPT10-02 KPT10-03 KPT12-03 KPT12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 24.5 26.5 27 29

KG

27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5 8 21.6 14.9 18.5 15.2 12 23 Applicable tubing 21.6 14.9 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 22 20.9 17 28.5 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101

IDX-OM-M050

1 1 . 2 Options of product . 1 2 1. 2. 1 Anti-corrosive treated copper tube (option C) . 1 2 1. 2. 2 Medium pressure type (option K) . 1 2 1. 2. 3 Metal name plate (option P) . 1 2 1. 2. 4 Ground fault circuit interrupter (option R) . 1 2 1. 2. 5 Timer type solenoid valve with auto drain (option V) . 1 2 1. 2. 6 Ventilation direction . 1 2 1 . 3 Name and function of parts . 1 3 Chapter 2

AS-FG/ASD-FG

Type 3 Universal Applicable tube outside diameter Metric size Inch size With One-touch fitting 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Stainless steel specification (SUS303) Thread type Nil Metric threads (M5) Unified threads (10-32UNF) R(PT) NPT Port size M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 N Needle Valve/Flow Rate Characteristics

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

Series AK1000

) tGauge port (Outlet) 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 2) Other range available.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size With One-touch fitting 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 Stainless steel specifications (SUS303) AS Thread type ASP Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AQ ASV AK ASS ASR Needle Valve/Flow Characteristics ASF ASD230FG ASD330FG ASD430FG

IDX-OM-N030

Name and Function of Parts 1 . 1 Part number of product .1 1 1 . 2 Options of product.1 2 1. 2. 1 Anti-corrosive treated copper tube (option C) .1 2 1. 2. 2 Medium pressure type (option K) .1 2 1. 2. 3 Ground fault circuit interrupter (option R) .1 2 1. 2. 4 Timer type solenoid valve with auto drain (option V) .1 2 1 . 3 Name and function of parts .1 3 Chapter 2 Transportation and installation

PSE200

CAT.ES100-41 A Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE

LFE-OMY0008

OUT2 OUT1 1. 1. 1. 1.

5 Port Solenoid Valve SY Series

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075

4/5 Port Air Operated Valve Series SYJA3000 1

type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 3 position

4/5 Port Air Operated Valve SYJA3000 Series

VGA Port size Symbol Body ported Thread type VPA Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 2 position single 2 position double 1/8 With sub-plate 01 F N T VPA3 2(B) (A)4 2(B) (A)4 3 position closed center 3 position exhaust center (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position

IDX-OM-U022

-4 i.2.6 . i-4 i.2.7 . i-4 i.2.8 . i-5 i.2.9 . i-6 i.3 . i-7 i.4 / . i-7 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 R . 1-2 1.2.5 V . 1-2 1.3 . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 2.3 . 2-8 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 1 3.5 . 3-2 3.6 . 3-2 3.7 . 3-3 3.8 . 3

Air cylinder

Name Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 2 7 Bushing 1 8 Cushion valve 2 9 Tie rod 4 10 Hexagon nut 8 11 Bumper 2 12 Wear ring 1 13 Scraper 1 14 Rod seal 1 15 Cushion seal 2 16 Piston seal 1 17 Cushion valve seal 2 18 Cylinder tube gasket 2 19 Magnet (1) 32 - Revision history B Revise by adding 180 to 320.

IZx-OMV0005

Doc. no.IZ-OMV0005 PRODUCT NAME Ionizer Nozzle type MODEL / Series IZN10E Series 1 Doc. no.IZ-OMV0005 Contents Safety Instructions . 3 1. How to Order . 9 1-1.Ionizer body . 9 1-2.Accessories . 10 1-3.Repair parts . 11 1-4. Options . 12 2. Procedures to Operation . 12 3. Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLAV16-30-1-2 XLAV25-30-1-2 XLAV40-30-1-2 XLAV50-30-1-2 With XLAV16A-30-1-2 XLAV25A-30-1-2 XLAV40A-30-1-2 XLAV50A-30-1-2 Indicator Valve size 63 80 Without XLAV63-30-1-2 XLAV80-30-1-2 With XLAV63A-30-1-2 XLAV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.