21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Ionizer IZN10 Series

Ionizer IZN10 Series RoHS How to Order 01 P IZN10 06 High frequency AC nozzle type Without maintenance detector X194 Made to Order Nozzle type Type Energy saving static neutralization nozzle Symbol Refer to page 449. 01 High flow rate nozzle 02 Bracket Female threads for piping Note) Rc1/8 11 Without bracket Nil Note) Nozzle shape: When using the female thread for the piping, connect the

Nozzle Type Ionizer IZN10E Series ®

Nil With power supply cable (3 m) IZN10E-CP Z With power supply cable (10 m) IZN10E-CPZ N Without power supply cable * Mounting is interchangeable with the current model (IZN10).

Thermo-chiller

1900 W (50/60 Hz) 030 Cooling capacity 2500/2900 W (50/60 Hz) Environmentally resistant type R Environmentally resistant type Cooling method Option A Air-cooled refrigeration Symbol Description Nil None J With automatic fluid fill function L Large capacity tank specification V Stainless steel panel specification W SI unit only Pipe thread type Nil Rc F G (with PT-G conversion fitting set) N

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

JIS Symbol G Port size Symbol Port size Size 30 1/4 50 $ 60 75 100 02 03 04 $ Bracket Assembly (Accessory) Part No. $ $ $ $ $ 3/8 Part no. Applicable model BM64 BM65 $ $ $ 1/2 IDG30

S

Series S0700 Slim Compact Plug-in Manifold Bar Base kit (SerialTransmission) EX180 (For Output) SerialTransmission System S How to Order Manifold SS0751 08 C4 C8 Stations Symbol Stations Option 02 2 station Symbol Specifications None Nil D D0 Dl K Note 2) 32 Note) 32 stations With DIN rail (Rail length: Standard) Note) The maximum number of stations will be different depending on the wiring

How to Order 90-SV Series Single Valve/Sub-plate Type IP67 Compliant

Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1 2 5 U D Series compatible with secondary batteries Thread type Nil F N T Rc G NPT NPTF 90 Material restriction Series 2 4 90-SV2000 90-SV4000 Port size Type of actuation Port size Without sub-plate Symbol Nil 02 03 04 Applicable series 2 position single (A) 4 (B) 2 90-SV2000 90-SV4000 90-SV4000 1/4 3/8 1/2

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

VCB F N G Coil type NPT G Grommet / Tape winding W Grommet / Molded VCL Port size VCS Port size Symbol Series 20 p p 30 10 p VCW M5 01 02 p p M5 1/8 (6A) 1/4 (8A) Magnet wire protection: Tape winding Magnet wire protection: Resin Molded Orifice diameter F Faston terminal / Molded Orifice diameter (mm ) Symbol Series 1 2 1 2 3 2 3 4 1 10 1.6 1.6 2.3 20 3.2 2 Magnet wire protection:

VFA1000 / 3000 / 5000 Series 5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 VFA1000 VFA3000 VFA5000 Symbol M5 01 02 03 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only. Not available with the VFA5000. 1498

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

How to Order VPA300/500/700 Series 3 Port/Air Operated Valve Body Ported/Single Unit

Nil V Standard For vacuum X505 VPA500 series Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF VPA700 series Specifications Air Fluid N.C. or N.O.

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications Nil K Standard type (0.7 MPa) High-pressure type (1 MPa) Thread type Nil F N

Body Size: 3, Set Pressure: 2 (1.5 to 116 psi [0.01 to 0.8 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: B (w/Bracket), Semi-standard: RZ (Flow Direction: Right to Left + Name Plate & Pressure Gauge in Imperial Units: psi)

Body Size: 3, Set Pressure: 2 (1.5 to 116 psi [0.01 to 0.8 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 02 (1/4), Option: None, Semi-standard: RZ (Flow Direction: Right to Left + Name Plate & Pressure Gauge in Imperial Units: psi)

Size: 3 (30), Body Material: C (Brass), Seal Material: F (FKM), Port Size: 02 (1/4), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: H (Set Nut for Panel Mount), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: D (N.O.