Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 29.2 30 0.3 5 8.5 4.8 19 18.5 K 5 8.5 18.5 KA NA x M4 x 0.7 thread depth 4 M 27 4H9 ( ) depth 4 +0.030 0 3 x M5 x 0.8 thread depth 8 2 N 1 x F 35 13 4 x M4 x 0.7 thread depth 6 5 F 2.5 1 10 (Extension end adjuster) 1 19.5 20 22 14.5 29 20 39 46 5 N x M4 x 0.7 thread depth 5 Note 1) Note 2) Extension end adjuster Retraction end adjuster 8 4.5 4H9

Vacuum Pad: Ball Joint Type

-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 16 18 32 35 2 13 16 49 40 50 ZPT F-B5-A14 (Without buffer/Male thread) M14 x 1 M5 x 0.8 Hexagon width across flats 19 5 5 20 D 5 F Hexagon width across flats 21 C Y 2.5 A B Dimensions (mm) A B C D F Y Model ZPT40F-B5-A14 40 43 12.5 18.5 51.5 5 ZPT50F-B5-A14 50 53 13.5 19.5 52.5 6 710 Vacuum Pad: Ball Joint Type Vertical Vacuum

CLQ

B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through

Microspeed Cylinder

(0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Shock absorber specifications cannot be changed by replacing or adding parts. 50 to 500 80 245 80 245 10 to 60 1.96 3.83 15 1.96 4.22 15 Spring force N Extended Compressed Weight g Minimum Strokes for Auto Switch Mounting (mm) Applicable auto switch models Number of auto switches mounted 1 pc. 2 pcs. 5 10 5 10 5 5 D-A9, D-A9V D-F9, D-F9V D-F9W, D-F9WV D-F9BA 2 Series MXP Table Deflection

-DR-40 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $24.21 Add to Quote Add To Cart Add to Cart SMC AXT100-DR-5 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $11.90

-DR-40 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $24.21 Add to Quote Add To Cart Add to Cart SMC AXT100-DR-5 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $11.90

-DR-40 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $24.21 Add to Quote Add To Cart Add to Cart SMC AXT100-DR-5 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $11.90

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

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PFA/PFW

Construction For air Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR SUS PBT PBT Flow direction 5 Series PFA Digital Flow Switch for Air For Air Dimensions (mm)/ Integrated Display Type 1in=25.4mm Scale: 70% PFA7 0-m 1 5 -27 (N) -67 (N) 67 98 58 6 82 17 1.6 60 FLOW SWITCH UP 34 54 44 SET OUT1 OUT2 DOWN FOR AIR 24 2-Piping port size 4-4.5 40 50 (41.5

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

1

D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

MXW

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Modular F.R.L. Unit

03 E30002 03 04 E500-06 Note 5) Piping adapter E400Note 5) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-40 Pressure switch with piping adapter Note 5) Y2401 02 Y3401 02 Y4402 03 Y5403 04 Cross interface Note 1) in part number for the round pressure gauge indicates a type of connection thread.

Electric Actuator Triple Axis P&P Unit

Remove the thin head screws (TP-M3 x 5, 8 pcs.) fixing the pulley cover using a hexagon wrench. Use a normal hexagon wrench. TP-M3 x 5 TP-M3 x 5 2. Pull out the pulley cover in the direction of the arrow. Pulley cover Motor mounting process 1.

IDX-OM-V020

. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART. 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter

IDX-OM-W020

. i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1

17

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