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OF POWER SUPPLY . 10-2 Chapter 11 Option T .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record

) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

M3 x 30 screw for connection to the valve manifold 1 SI0 V 0 V for SI unit operation 4 Seal cap 1 pc. seal cap for unused fieldbus interface connector (BUS OUT) Unused 5 Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. The M12 connector cable has two types, SPEEDCON compatible and non-compatible.

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

(#1 + #3) SMXP10#2 (#2 + #4) L K J V H S Z G M W Model 20 20 52.4 44 32 10 60 8 21 6.5 40 MXP10-10 36 36 82.4 74 50 20 90 20 39 7.5 65 MXP10-20 9 Precision Air Slide Table Series MXP Dimensions MXP10/With Shock Absorber Z 3 2-M3 x 0.5 depth 5 V K 5 N M Stroke: S Max. 19 MXP10-10B Width across flats 12 A M8 x 1 12.5 H MA 5.3 14.4 7 6.5 40.8 11 8.5 17.8 21 20 4-M4 x 0.7 Piping port 2-M5 x

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

PSE200-(M) : NPN open collector 5 outputs + Auto-shift 1 input Max. 30 V, 80 mA Residual voltage 1 V or less PSE201-(M) : PNP open collector 5 outputs + Auto-shift 1 input Max. 80 mA Residual voltage 1 V or less -17No.PS-OMH0006-F Setting of Function Setting procedures Measurement mode Detects pressure, displays values and performs switching.

spec., Oil-free Note 1) Non-leak, Oil-free H Steam (Max. 183C) Brass/Copper Non-leak, Oil-free B Note 1) L, M, V options are for non-lube treatment.

.:; ;,i=-, ,,.r:,,. ,:: 1::':::,4':::rr.i,;.::'i.ri:;.: 'i.t.i.il:i:i=*1+at=r=i1t:i:i:t:, =!i i:r-i=,, ti ' ' ' ,*r:,:,.r.,:::aa:.:;l.;:i.i.i.tii-,:,'.ar'''ll.'1:1,:,::,1*tlLr:f:fl:a::.:::a::l:a:..:r.:,,::,i,.i,i..,. -r.rLi'g+;,:,=.:11:i:::':itf::1.:i,;=:.:,1 ;,t .,.', , . i:,:*:,'*':,1=]:t*r:1:f?:t:a:l*!a,-,'a*r1]la::1::':..:::.:::.1 . . =r. r::!1::1+ti i:a"a:r:r ia '.

8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

Output impedance: Approx. 1 k -23 Switch output NPN open collector output 1 output Max. 30 V, 80 mA Failure predictive output NPN open collector output 1 output -24 Switch output NPN open collector output 1 output Max. 30 V, 80 mA Failure predictive output NPN open collector output 1 output Analog output: 1 to 5V (5%F.S.)

Applicable cable O.D. 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306 24 V No.2() Black() 48 V No.1 Diode DC None Z Coil LED No.2 No.1 S Coil Coil Varistor Varistor 6 V No.2 12 V No.1 DC None Z Coil No.2 Precautions on connection for 24 VDC or more Grommet type should be connected as following; Red lead wire for (+) side, Black lead wire for () side respectively

Lead wire length Model 3m (~9ft) 0.5m (~1 1/2ft) D-Y7PW(V)/3 wire PNP output 53 (1.9) 10 (0.35) D-Y7N, Y7P 50 (1.8) 9 (0.3) D-Y7B DC (+) Brown [Red] Dimensions (mm) Main switch circuit 1in = 25.4mm OUT Black [White] D-Y7W Mounting screw M2.5 x 4 l Slotted-head set screw 2.5 DC () Blue [Black] Indicator light 3.4 SMC 6.2 D-Y7BW(V)/2 wire 29 (500) (3000) (5000) OUT (+) Brown [Red] 5 l Operating

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

indication (2-color indication) 5 V, 12 V Relay, PLC Yes 2-wire 24 V Water resistant (2-color indication) 12 V Grommet IC circuit With diagnostic output (2-color indication) F79F 4-wire (NPN) 5 V, 12 V Magnetic field resistant (2-color indication) P5DW 2-wire Solid state switches marked with are produced upon receipt of order.

IC circuit Relay, PLC 5 V 12 V 100 V Yes Grommet 2-wire 100 V or less 24 V 5 V,12 V No Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Nw5z5-ar-(X)r ' NW5Z5-.2.L_rCr (D NVZ5000 Grommet/ 1,25120-OGOO-017 l{v:25120-oHoo41T DIN connctor (D)/ NVZsl2GODOO-017 6 .e .g flfi With Bracket : NVZ512O-OG-O|T-F 0.18(4.5)Oia I .irri , l r q I r l l+l I _.1-_ r181(3OO) ruo wiii-unerrri , r , r ' . r r l , , . ' , . r . 1 . . ; , t 1 ' . . : r 1 . : , . . ' i a i ' L type plug connector/N\Zsl2GOLOO-olT . , . : , , r r . . t , 1 . , ' .