High Vacuum L Type Valve Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 With XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 Indicator Valve size 63 80 Without XLFV63-30-1-2 XLFV80-30-1-2 With XLFV63A-30-1-2 XLFV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.
Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T A B C NBR seals FKM seals EPR seals Nil B Note) None With bracket Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 3 Note
thread M 1 8 KAH06-U01 14.5 6 5 12 19.5 17 1 4 KAH06-U02 13 17 14 12 13.1 13.1 10
Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction
(mm) 8 6 4 Model 10 12 Connection thread Male connector KSH KXH M5 x 0.8 M6 x 1 1 8 R K R 1 4 M R 3 8 H R 1 2 Male elbow KSL KXL D M5 x 0.8 M6 x 1 MS R 1 8 T R 1 4 VMG R 3 8 R 1 2 Precautions Be sure to read before handling.
(Symbol 1) IN (Symbol 2) OUT Option Nil None Bracket Manual override Bracket, Manual override 1 2 3 10R2 N.O.
Winding direction Port size Knob lifting force M5 10-32/UNF 1 to 1.5 N Sealant tape Expose approx. 1 thread 1/8, 1/4, 3/8, 1/2 3.5 to 4 N 4. Do not rotate the product by the indicator part. Use a wrench for mounting the product. Otherwise, it may cause damage to the product. 601
Please consult with SMC before applying paint to resinous parts, as this may have an adverse effect due to the solvent in the paint. 1/4 812 3/8 1520 1/2 2025 3/4 2830 1 3638 1 1/4 4042 1 1/2 4850 2 4850 3) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.
VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180
Body size (Base size) 2 3 4 6 1/4 base 3/8 base 1/2 base 1 base Port size (Nominal size) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Piping/Mounting Piping Note) Mounting method Body Panel mounting Body Panel mounting Symbol 0 1 2 3 Side Side Bottom Bottom Thread type Nil N F Note) Only side piping is available for VH200 and VH600 and R port is located on the bottom.
Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
Alarm for Step data Setting condition for step ALM1/code:1-048 is data is not correct. / Refer to the JXC controller generated < Correct set condition > operation manual. (1)Area 1 < Area 2
1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !
Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction
1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.
side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted Series 3 SYA3000 5 7 SYA5000 SYA7000 P, R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double
3/4) Nil B Nil F N T A B Rc G NPT NPTF None With bracket (VN-16) is valve size NBR seals FKM seals Note 1) Valve size 1 comes with VN1A16 (with thread).
Doc. no.IZ*-OMX0012-B PRODUCT NAME Ionizer Gun MODEL / Series / Product Number IZG10 1 Doc. no.IZ*-OMX0012-B Contents Safety Instructions . 3 1. How to Order . 9 1-1. Ionizer . 9 1-2. Accessories . 9 1-3. Repair parts . 10 2. How to Use . 11 2-1. Procedures to operation . 11 3. Wiring . 12 3-1. AC adapter type/ IZG10-01, 02 . 12 3-2. Power supply cable type/ IZG10-03 . 12 4.
Piping diameter VNA211A, CCVLO2 1/2B (13 mm) Skip valve VNA311A 3/4B (19 mm) VNA411A 1B (25 mm) Speed controller Stop valve 17-4-5 2 Series VNA How to Order Seal material Thread type Bracket (Valve size: 1/2/3/4.) A B C NBR seals FKM seals EPR seals Nil F N T Rc G NPT NPTF Nil B None With bracket (VN-16) :Valve size Note 1) Valve size 1 comes with NV1-A16 (with thread).