Air cylinder

Name Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 2 7 Bushing 1 8 Cushion valve 2 9 Tie rod 4 10 Hexagon nut 8 11 Bumper 2 12 Wear ring 1 13 Scraper 1 14 Rod seal 1 15 Cushion seal 2 16 Piston seal 1 17 Cushion valve seal 2 18 Cylinder tube gasket 2 19 Magnet (1) 32 - Revision history B Revise by adding 180 to 320.

IZx-OMV0005

Doc. no.IZ-OMV0005 PRODUCT NAME Ionizer Nozzle type MODEL / Series IZN10E Series 1 Doc. no.IZ-OMV0005 Contents Safety Instructions . 3 1. How to Order . 9 1-1.Ionizer body . 9 1-2.Accessories . 10 1-3.Repair parts . 11 1-4. Options . 12 2. Procedures to Operation . 12 3. Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLAV16-30-1-2 XLAV25-30-1-2 XLAV40-30-1-2 XLAV50-30-1-2 With XLAV16A-30-1-2 XLAV25A-30-1-2 XLAV40A-30-1-2 XLAV50A-30-1-2 Indicator Valve size 63 80 Without XLAV63-30-1-2 XLAV80-30-1-2 With XLAV63A-30-1-2 XLAV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 With XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 Indicator Valve size 63 80 Without XLFV63-30-1-2 XLFV80-30-1-2 With XLFV63A-30-1-2 XLFV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

Process Valve

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T A B C NBR seals FKM seals EPR seals Nil B Note) None With bracket Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 3 Note

KA

thread M 1 8 KAH06-U01 14.5 6 5 12 19.5 17 1 4 KAH06-U02 13 17 14 12 13.1 13.1 10 H 3 8 KAH06-U03 17.5 11.5 16 1 8 1 4 KAH08-U01 KAH08-U02 20.5 15.5 25 21.5 11 27 Applicable tubing 14 D 14 8 18.0 18.0 18.5 3 8 KAH08-U03 17 19.5 13.5 33 1 8 KAH10-U01 28 23 17 MS 1 4 3 8 KAH10-U02 KAH10-U03 22 18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction

KS/KX

(mm) 8 6 4 Model 10 12 Connection thread Male connector KSH KXH M5 x 0.8 M6 x 1 1 8 R K R 1 4 M R 3 8 H R 1 2 Male elbow KSL KXL D M5 x 0.8 M6 x 1 MS R 1 8 T R 1 4 VMG R 3 8 R 1 2 Precautions Be sure to read before handling.

PEEK

(Symbol 1) IN (Symbol 2) OUT Option Nil None Bracket Manual override Bracket, Manual override 1 2 3 10R2 N.O.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Winding direction Port size Knob lifting force M5 10-32/UNF 1 to 1.5 N Sealant tape Expose approx. 1 thread 1/8, 1/4, 3/8, 1/2 3.5 to 4 N 4. Do not rotate the product by the indicator part. Use a wrench for mounting the product. Otherwise, it may cause damage to the product. 601

VEX-OMT0003

Please consult with SMC before applying paint to resinous parts, as this may have an adverse effect due to the solvent in the paint. 1/4 812 3/8 1520 1/2 2025 3/4 2830 1 3638 1 1/4 4042 1 1/2 4850 2 4850 3) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.

Hand Valve Series VH 1

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

/code: 1-051 is generated.

Hand Valve Series VH

Body size (Base size) 2 3 4 6 1/4 base 3/8 base 1/2 base 1 base Port size (Nominal size) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Piping/Mounting Piping Note) Mounting method Body Panel mounting Body Panel mounting Symbol 0 1 2 3 Side Side Bottom Bottom Thread type Nil N F Note) Only side piping is available for VH200 and VH600 and R port is located on the bottom.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Alarm for Step data Setting condition for step ALM1/code:1-048 is data is not correct. / Refer to the JXC controller generated < Correct set condition > operation manual. (1)Area 1 < Area 2 Input the RESET signal.

ASR

1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

5 Port Air Operated Valve SYA3000/5000/7000 Series

side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted Series 3 SYA3000 5 7 SYA5000 SYA7000 P, R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double