Series: 5, Actuation: 2 Position Single, Piping: Body Ported, Port Size: One-touch Fitting for ø1/4", Thread: NPT, Bracket: w/Side Bracket

Series: 5, Actuation: 2 Position Double, Piping: Body Ported, Port Size: One-touch Fitting for ø1/4", Thread: NPT, Bracket: w/Side Bracket

Series: VQZ2000, Configuration: 3 Position Exhaust Center, Seal Type: Rubber Seal, Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire, Light & Surge Suppressor, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 1/4" One-touch Fitting, Thread: NPT, Foot Bracket: -, CE Compliant: -

Series: VQZ3000, Configuration: 2 Position Single, Seal Type: Rubber Seal, Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Suppressor, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 1/4" One-touch Fitting, Thread: NPT, Foot Bracket: -, CE Compliant: -

Series: VQZ1000, Configuration: 2 Position Single, Seal Type: Metal Seal, Function: High Speed Response 0.9W - DC Only, Coil Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire, Light & Surge Suppressor, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 1/4" One-touch Fitting, Thread: NPT, Foot Bracket: -, CE Compliant: -

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: WO (M8 Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread: N (NPT)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: WO (M8 Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread: N

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: N7 (1/4" One-touch Fitting),

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread: N (NPT

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: WO (M8 Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread: N (NPT)

Modular F.R.L. Unit

-06 02 03 04 06 E400E500-06 Piping adapter Note 5) E20001 02 03 E30002 03 04 E30002 03 04 02 03 04 06 IS1000E-40 Pressure switch with piping adapter Note 5) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Cross interface Note 5) Y2401 02 Y3401 02 Y3401 02 Y4402 03 Y5403 04 Note 1) in part number for the round pressure gauge indicates a type of connection thread.

Speed Controller with Indicator

, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Proposals for Energy Saving

06 08 10 12 16 Symbol 01 02 03 04 06 Tubing O.D. mm 4 6 8 10 12 16 Hose O.D.

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

Modular F.R.L. Unit

) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02

VFR

How to Order Sub-plate Assembly Pilot type Nil R External pilot Internal pilot Thread type Plug-in VFR4000 P 04 Nil Rc Non plug-in VFS4000 S 04 G F N NPT NPTF T B Plug-in VFR4000 P 04 Non plug-in VFS4000 S 04 B Piping port (P, A, B port) Note) Bottom ported is not available for external pilot.

VFS

03 04 q Description No.

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5

Table of Contents

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350