Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: M5, Application: Individual Item, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction Flow(l/min): 4.5

Main Body Shape: Unit, Additional Function: Silencers / Filter / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 1/8 (Ø3.18), Air Supply Port Connecting Shape: M5, Application: Individual Item, Performance: Large Flow Rate Type, Operating Temperature Range

Main Body Shape: Unit, Additional Function: Filter / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: M5, Application: Individual Item, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 5/32 (Ø3.97), Air Supply Port Connecting Shape: -, Application: Manifolds, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction Flow(l/min):

Main Body Shape: Unit, Additional Function: Silencers / Filter / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Application: Manifolds, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction

Main Body Shape: Unit, Additional Function: Silencers / Filter / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Application: Manifolds, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction

Main Body Shape: Unit, Additional Function: Silencers / Filter / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Application: Manifolds, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50, Suction

Main Body Shape: Unit, Additional Function: Silencers / Filter / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 10, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Application: Manifolds, Performance: Large Flow Rate Type, Operating Temperature Range(°C): -5～50,

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Microspeed Cylinder

(0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

AMR3000 to 6000

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

Rotary One-touch Fittings Manifold Series KM

F(mm) Port B min. port size Weight (g) L1 L2 L3 L4 L5 L6 P Q1 Q2 M KM12-04-02-6 6 17 89 110 99 125 108 139 40 67 75 84 96 100 117 1 4 4 10 18 29.5 19.5 29 10.6 16 6 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 6 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 73 55 3 8 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 86 63 Series KM One-touch Fittings

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Example) For 10-CQSXB25-47D, a 3mm spacer is installed inside a standard stroke 10-CQSXB25-50D cylinder.

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

,

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

,

P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position