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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved 09-E548 D-DN Vinyl Chloride Air Operated Valve Series LVP Piping from 4 directions are possible.

L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 5 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 2 to 200 L/min 1 to 1 L/min 10 to 1000 L/min 3 to 3 L/min 20 to 2000 L/min Power supply voltage 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard)

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

MFLD, VFS3000 PLUG-IN, VALVE, VV*FS* MANIFOLD VFS SERIES, QM, VV*FS* BASE MT 3/8, 12.12542 lb

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

Number No. r t y u i SS070A 01 1A O-ring FKM SS070A-80A-1 10 VFN Port size Clip Stainless steel SS070A-80A-2 10 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel SS070A-80A-4 10 Mounting bracket Stainless steel SS070A-80A-5 10 < U Side End Plate Assembly > w U side end plate assembly no.

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 04 06 08 10 12 19 03 05 07 11 13 19 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable