Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: PR (PROFIBUS DP®), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: Rc(PT), Port Size: 4 [1/2 (3000)], Accessory: None, Cable Connector: N (w/oCable Connector)

Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: PR (PROFIBUS DP®), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: F [G(PF)], Port Size: 2 [1/4 (1000,2000,3000)], Accessory: None, Cable Connector: N (w/oCable Connector)

Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: PR (PROFIBUS DP®), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 3 [3/8 (2000,3000)], Accessory: None, Cable Connector: N (w/oCable Connector)

Model: 10 (200 L/min [ANR]), Pressure Range: 3 (0.005~0.5MPa), Power Voltage: 0 (24VDC), Input Signal: PR (PROFIBUS DP®), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 1 [1/8 (1000)], Accessory: C (L Bracket), Cable Connector: S (Straight Style 3m)

4/5 Port Solenoid Valve

area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port Manifold Body ported for internal pilot Type SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 Type SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 Type SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25

2

Model Note) Port size A B C D E Applicable model Y110-M5-A M5 x 0.8 11.2 19 12 14 8 AC10-A, AC10B-A Y210-l01-A 1/8 14.6 41.8 32 28 19 AC20-B, AC20B-B AC20C-B Y210-l02-A 1/4 Y310-l01-A 1/8 14.6 52.7 38.7 30 19 AC25-B, AC25B-B AC25C-B, AC30C-B Y310-l02-A 1/4 Y410-l02-A 1/4 18.6 62 44 36 24 AC40-B, AC40B-B AC40C-B Y410-l03-A 3/8 Y510-l02-A 1/4 18.6 66 46 44 24 AC40-06-B, AC40B-06-B AC40C-06-

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZSE10 compact, digital pressure switch for vacuum/compound pressure has been reduced in height by approximately 50% when compared to the ZSE30A.? Up to 10 slave sensors can be set at once using the copy settings function.? Options include?direct mount, panel mount?or DIN rail mount, and a choice of 2 piping directions.?, OTHER NO SIZE RATING, VACUUM SERIES, ZSE30 VACUUM SWITCH, 2X,

Table of Contents

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

Table of Contents

M5 x 0.8 M-5ALHN-6 M-5ALHU-6 Width across flats 7 M5 x 0.8 Hose Nipple: M-5H-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5

Compact Cylinder

x 25L x 30L CQ-M5 x 30L x 35L CQ-M5 x 30L x 35L CQ-M5 x 35L x 40L CQ-M6 x 45L x 55L 25 6.5 Spring state with second mounting load 32 5 40 IN 7.5 50 9.5 When spring is compressed with air 9 7.5 12.5 114 Series CQP2 Construction B A Spring return B A Port size M5 x 0.8 A-A section (Port on rod end) B-B section (Port on head end) Spring extend A-A section (Port on rod end) B-B section (Port

Table of Contents

x 0.8 G: Rc Y B C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Single solenoid coil is located on the same side of A and B ports. : : Nil P port thread type 20 20 stations M5 x 0.8 R1, R2 port Rc Nil S A, B port size P G F A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A M5 x 0.8 M5 B NPT N A, B port M5 x 0.8, C4 One-touch fitting for 4 C4 NPTF T N3 One-touch fitting for 5/32" 506 10-SYJ3000 Manifold specifications Flat ribbon cable manifold Common SUP

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil M5 x 0.8 R1, R2 port 20 20 stations + + + + + + + Nil Rc Applicable solenoid valve 10-SYJ343-(-Q) Single solenoid pilot valve is on same side as the A, B port. P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

on same side of A and B port 1 station Nil P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Thread type R port: Rc 1/8 20 Solenoid on same side of A and B port 20 stations Type S41 Nil F N T Rc S Type VK334 Type VK3140 Port size G M5 M5 x 0.8 C4 4 cassette NPT P port: Rc 1/8 NPTF R port: Rc 1/8 B port: M5 x 0.8 A port: M5 x 0.8 Type 42: Base mounted (A, B port side ported) How to Order Applicable

NCQ2/CQ2

A Spring return B A Port size M5 x 0.8 Spring extend A-A section (Port on rod end) B-B section (Port on head end) Rod end male thread Replacement Parts/Seal Kit Component Parts Note Description Cylinder tube Piston Material Aluminum alloy Aluminum alloy Stainless steel No. 1 2 Kit no.

Table of Contents

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

Table of Contents

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,