XL

50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Compact

mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

MXW

depth 4.5 0 (mm) E F G Model GG H J K L N Z MXW12-100 91 123 82.5 30 35 114 35 51 5 280 MXW12-125 111 158 102.5 32.5 35 137 60 76 6 330 MXW12-150 136 182 127.5 47.5 40 164 85 101 6 380 8-7-13 14 Series MXW Dimensions: MXW16 Stroke 75, 100 mm Operating port 2-M5 x 0.8 Width across flats 3 116 14 8 Width across flats 10 Operating port M5 x 0.8 6-M5 x 0.8 thread depth 9 (Helisert) depth 5.5

10

MPa 100 100 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 120 120 80 80 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 60 60 0.4 MPa 0.3 MPa 80 80 0.4 MPa 0.3 MPa 40 40 0.3 MPa 0.3 MPa 0.2 MPa 40 40 0.2 MPa 0.2 MPa 20 20 0.2 MPa 20 40 60 80 100 120 0 40 80 120 160 200 0 0 0 40 80 120 160 20 40 60 80 100 120 140 Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R

High Vacuum Angle Valve, XL Series

50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0

Passage: 21 (Common SUP, Individual EXH), Stations: 4 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 12 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 3 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 8 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 9 Stations

Passage: 21 (Common SUP, Individual EXH), Stations: 3 Stations

Passage: 21 (Common SUP, Individual EXH), Stations: 8 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 10 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 11 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 1 Station

Passage: 20 (Common SUP,Common EXH), Stations: 4 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 5 Stations

Passage: 20 (Common SUP,Common EXH), Stations: 6 Stations

Passage: Common SUP, Individual EXH, Stations: 4 Stations, Thread: -