VQ5000

(common EXH type) 3 R 1(P) 40.3 4(A) 2(B) 03: 3/8 04: 1/2 3(R') 3(R2) 5(R1) Circuit diagram Plug-in type Plug lead type 34 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts 179 (plug-in type) 133 (plug lead type) Throttle valve spacer 32 16 VVQ5000-20A-1 (plug-in type) VVQ5000-20A-5 (plug lead type) 3 5 1(P) 4(A) A throttle valve spacer is mounted on a manifold

Sensor Monitor

Measurement mode (Initial setting is completed) Perform the setting with the 3 step setting mode, simple setting mode and function selection mode. -20No.PS-OMU0012-C 3 Step Setting Mode 3 step setting mode In this mode, the set values can be input in just 3 steps. Use this mode if the product is to be used straight away, after changing only the set values.

I

Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output S W I T C H S P E C I F I C AT I O N S 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output W I R I N G S P E C I F I C AT I O N S 0.6m L Grommet entry 3m lead W I R I N G S P E C I F I C AT I O N S L Grommet Entry 3m Lead 0.6m Courtesy of Steven Engineering, Inc. !

HRX-OM-W058

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

HRX-OM-X027

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(common EXH type) 3 R 1(P) 40.3 4(A) 2(B) 03: 3/8 04: 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 34 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts 179 (plug-in type) 133 (plug lead type) Throttle valve spacer 32 16 VVQ5000-20A-1 (plug-in type) VVQ5000-20A-5 (plug lead type) 3 5 1(P) 4(A) A throttle valve spacer is mounted on a manifold

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Speed Controller with One-touch Fittings Series AS In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

Safety Instructions

Viscosity according to ISO Grade 32 Classification of viscosity (cst) (40C) Turbine oil P-32 Idemitsu Kosan Co.,Ltd. Caution Turbine oil 32 Nippon Mitsubishi Oil Corp. Cosmo turbine 32 Cosmo Oil Co.,Ltd. Series LV Kyodo turbine 32 Japan Energy Corp. Turbine oil 32 Kygnus Oil Co. 1.

JXCx-OMT0062

. 32 (3) Example circuit 3 Motor power shutdown . 33 7.

Air Fittings Fitting Series For Special Environment

9 3 ( 5 . 0 6 4 2 . 1 ) 5 . 1 3 ( 4 5 . 1 ) 9 3 ( 4 9 . 0 ) 4 2 ( 5 3 . 0 ) 9 ( 7 . 9 2 4 / 1 S 5 3 3 1 L R K 1 1 / 6 1 ) 6 4 . 7 1 ( 4 0 . 1 ) 5 . 6 2 ( 7 6 . 0 ) 7 1 ( 2 2 . 1 ) 1 3 ( 8 / 3 S 6 3 3 1 L R K 2 3 . 1 ) 5 . 3 3 ( 1 6 . 1 ) 1 4 ( 8 3 . 0 ) 6 . 9 ( 2 / 1 7 . 7 3 2 / 1 S 7 3 3 1 L R K 7/8 ) 3 2 . 2 2 ( 8 4 . 1 ) 5 . 7 3 ( 7 6 . 1 ) 5 . 2 4 ( 7 . 3 6 Note: Fitting cover ordered

1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

AC Servo Motor Driver (CC-Link Type)

RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

12.5 10 3.5 AS2001F-03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16"

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

12.5 10 3.5 AS2001F-03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16"

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(A) (A) 2(A) 2(A) 2 2 3(R) (P)1 3(R) (P)1 i i 1 (P) 3 (R) 1 (P) 3 (R) u u Component Parts Replacement Parts No. 1 2 3 4 5 6 Description Body Piston plate End cover Piston Spool valve assembly Spool spring Description Sub-plate Note) Note White White White Note Aluminum die-cast Part no.

Refrigerated Air Dryer

] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283 275 498 455 15 270 31 80 230 32 15 240 80 284 42 3/4 355 300 568 485 4 6 Refrigerant HFC134a High inlet air temperature Series IDUE 3E, 4E, 6E (Inlet air temperature

JXCx-OMY0006

Operation methods 32 8.1 Outline 32 8.2 Operation by Step No. 32 8.3 Position/speed monitor 32 8.4 Operation by numerical instruction 32 9. Memory map 33 9.1 Memory allocation 33 (1) Input Area Mapping 33 (2) Input area mapping of upper level device 34 (3) Output area mapping 38 (4) From upper devices to controller (details) 38 10.

Pin Clamp Cylinder Series CKQ/CLKQ

3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

Series IDG

4 inch) H 302 346 G 361 405 293 337 271 315 IDG30, 30H, 30L IDG50, 50H, 50L IDG60, 60H IDG75, 75H, 100, 100H IDG60L, 60S IDG75L, 75S IDG100L, 100S 1/4, 3/8 3/8, 1/2 1/2 330 352 369 428 370 392 409 468 450 472 489 548 3/8, 1/2 520 542 559 618 16 Air Dryer Series IDG Membrane Air Dryer Unit Units (M Type, V Type) How to Order F = (C x 1.8) + 32 1l/min = 0.0353SCFM IDG 30 M 03 Optional specifications