ITVH

Working Principle Diagram VY1 Pressure display VBA VBAT Output signal Power supply i Control circuit AP100 Input signal w Exhaust solenoid valve q Air supply solenoid valve e Built-in regulator Built-in regulator EXH Solenoid valve EXH P u Pressure sensor t Diaphragm r Pilot chamber EXH y Air supply valve SUP OUT 959 ITVH2000 Series ITVH2000 Series Linearity Hysteresis 2.5 1.0 Output deviation

IR30-OM00013

SU P.

LZ-OM004xx

W H V Procedure of adjustm ent and test run LC3F2 motor output terminal (CN3). Pin No. Terminal Function L[]ZC[]3 : M3 x 0.5 x 3 deep L[]ZC[]5 : M4 x 0.7 x 3 deep CN3 Motor output term inal electric cylinders motor. 45 Mounting Auto switch control equipment. (1) Supply power and wiring. 6. Test run details 5.

3

2 q w e r t y !1 !0 o i u Component Parts No.

Miniature Guide Rod Cylinder Series MGJ

6 w i !4 !3 y u r !1 q t !2 !5 e !1 No.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

ZMA

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

CJ2Q

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !

Digital Pressure Switch

2.00 to -5.00 to -10.00 to Pressure spec. 1.000 kPa 2.00 kPa 5.00 kPa 10.00 kPa Display/Set pressure range -525 to 525 Pa -1.050 to -2.10 to -5.25 to -10.50 to 1.050 kPa 2.10 kPa 5.25 kPa 10.50 kPa Display/Min. setting unit 1 Pa 0.001 kPa 0.01 kPa 0.01 kPa 0.01 kPa Proof pressure 2.5 kPa 5 kPa 10 kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p

AMPSeries

(Phoenix) 2001 W. Melinda Lane Phoenix, AZ 85027 Tel: (623) 492-0908 FAX: (623) 492-9493 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, IL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc.

Exhaust Cleaner for Clean Rooms AMP Series

(Phoenix) 2001 W. Melinda Lane Phoenix, AZ 85027 Tel: (623) 492-0908 FAX: (623) 492-9493 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, IL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc.

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)