0.5

level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400

Thermo-chiller

D-G

Ionizer

Note 2) Use standard power cables for 3 m and 10 m lengths.

Rotary One-touch Fittings Manifold Series KM

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

Series H, DL, L, LL Self-align Fittings

L D 4 6 DP-04 DP-06 5.6 7.6 0.2 0.5 8 DP-08 8 9.6 0.8 10 DP-10 11.6 1.2 12 DP-12 13.6 1.6 Swivel elbow: L Effective orifice (mm2) Applicable tube O.D. (mm) Thread R(PT) H1 (Hex.) H2 (Hex.) H3 (Hex.) H4 (Hex.) Weight (g) Part No.

25

One-touch fitting 06 08 10 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Power supply cable Refer to the table below for selection of One-touch fittings.

A_HEC-OM-J017

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK UT CR 4-2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

In-line Air Filter

10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 20 40 60 80 100 0 0 0

HRX-OM-Z002

Scope of Warranty" HRLE Series Product Warranty 10-1 HRX-OM-Z002 Chapter 10 Product Warranty 6. Request to customers Proper use and maintenance are essential to assure safe use of this product. Be sure to satisfy the following preconditions.

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

IDX-OM-O004E

Specification for Option L 10 . 1 Safety instructions . 10 1 10 . 2 Specifications . 10 1 10 . 3 Installation of heavy duty auto drain . 10 2 10 . 4 Maintenance . 10 2 Chapter 11 Specification for Option M 11 . 1 Safety instructions . 11 1 11 . 2 Specifications . 11 1 11 . 3 Installation of motor type auto drain . 11 2 11 . 4 Electric wiring diagram . 11 2 Chapter 12 Specification for Option

IDX-OM-W017

L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

20 30 100 300 mm 600 mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

IDX-OM-W031

Option Specification R 10 1 Safety instructions . 10 1 10 2 Specifications of GFCI . 10 1 10 3 How to connect the power supply . 10 2 10 4 Cautions for handling the GFCI . 10 2 10 5 Electrical Circuit . 10 2 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable .

PEEK

(Symbol 1) IN (Symbol 2) OUT 6 10 2 Wetted part material 20R4 N.O.

Sensor Monitor

For precise pressure detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -64No.PS-OMU0012-C Problem No.

CYP_EN

10-AS2301F-01-04-X214 Resin-body Universal type 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 One-touch (Restrictor) fitting 10-AS2301F-01-06-X214 mounted type 10-AS1001F-04-X214 10-AS2001F-04-X214 In-line type (Restrictor) 10-AS1001F-06-X214 10-AS2001F-06-X214 10-ASD230F-M5-04 10-ASD330F-01-06 Dual type (Speed controller) 10-ASD230F-M5-06 10-ASD330F-01-08 Note 1) See SMC Pneumatic Clean Series

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

99

) FGH100-06 {Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure