LEJ-OM004xx

The vacuum aspiration fluence shows the fluence immediately before piping in the actuator. 5 - 3.How to Order 11LEJS 40 A 500 S2 1 10 9 8 7 4 5 3 2 6 *1 (2) Motor type (3) Lead [mm] (1) Size 40 LEJS40 LEJS63 Output [W] Actuator size Compatible controller Type 63 16 A 20 AC servo motor (incremental encoder) S2 10 8 B LECSA-S1 40 100 (5) Motor option AC servo motor (incremental encoder) S3

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

7!8 !9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

VZM400

7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !3 Rubber t POM End cover !

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

4 5 WA WB 2 2.5 XA XB 4 5 YC 7 7.5 +0.030 0 +0.030 0 +0.074 0 +0.074 0 +0.030 0 +0.030 0 52H9 65H9 4H9 5H9 7

EX500-GEN2_eng

IP65 Enclosure rating 8 8 2 8 2 2 3 3 7 7 3 7 Operation: -10 to 50 oC, Storage: -20 to 60 oC (No condensation or freezing) Ambient temperature range 4 4 6 4 6 6 1 2 3 4 5 5 5 Operation, Storage: 35 to 85%RH (No condensation) Operating humidity range L IP address No corrosive gas Operating atmosphere 48 52 Setting 550 g Weight Description After maintenance is complete, perform appropriate

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

DeviceNet-E

Set t i ng w hen f act ory i s shi pped 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 OFF OFF OFF OFF OFF OFF OFF OFF OFF OFF 7 Pressure set t i ng and out put m oni t ori ng Pressure can be set by sendi ng t he i nput dat a, i n w hi ch F. S. consi st s of 12 bi t s, t o t he E/P regul at or t hrough m ast er PLC( t arget val ue t o w ord area) . Set t i ng D at e 0h 0FFFh [ ( aF.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Magnetically Coupled Rodless Cylinder/Slider Type: Slide Bearing Series CY1S

CY1S32-PS-N CY1S40-PS-N Piston seal NBR Set of left nos. @6, @7, @8, @9, #0, #1 Scraper NBR 6: Not available Note 1) Seal kit includes @7 to #0 for 6. @7 to #1 are for 10. @0 to #1 are for 15 to 40.

10-cy1s-e

CY1S32-PS-N CY1S40-PS-N Piston seal NBR Set of left nos. @6, @7, @8, @9, #0, #1 Scraper NBR 6: Not available Note 1) Seal kit includes @7 to #0 for 6. @7 to #1 are for 10. @0 to #1 are for 15 to 40.

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC

with the switch output)Voltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC

Thermo-chiller Basic Type HRSE Series

C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating uid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated ow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2 Fluid

Large Size Vacuum Module: Series ZR

ZR1-F-D Filter switch unit for replacement 12 Refer to Table (5) on page 944-1. Pilot valve assembly Valve body assembly 6 7 Refer to Table (1) on page 944-1. Note 1) Precautions on handling the filter case 1. The case is made of polycarbonate.

High Purity Chemical Valve

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil Variations N LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter 4 8 10 16 22 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Basic type N.C. PB PA PA N.O.

ZR

Example) ZR120S1-K15MZ-EC . 1 pc. ZR1-RV1 . 1 pc. 13-3-7 7 Series ZR Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Replacement Parts No.

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.