AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

For manual workpiece setting processes Manually operated handle (Unclamping position) CKZT32 16-E682 CKZT -X2797 (Base Type) -X2798 (With Manually Operated Handle) Power Clamp Cylinder T Z K C -X2797 -X2798 Compact Type 25, 32 How to Order CKZT X2797 S 25 105 Base type X2798 CKZT S 25 105 L With manually operated handle Bore size Manually operated handle mounting position L (Left side mounting

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Surge Voltage Suppressor, Positive Common), Manual Override: Non-locking Push Type, A,B Port Size: Base Mounted Valve, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting Option: Mounting Screw, Round Head Combination Screw

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen.

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 600mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: A (Air Cushion), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen.

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: A (Air Cushion), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: V (Single Knuckle Joint), Auto Switch: M9P--Solid State, Gen.

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: Standard, Attachment: TV1 (T + V1), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Standard

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: A (Air Cushion), Bore: 32mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 32mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen.

Magnet: None, Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 250mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot

Size: For AC1000, Model: Branch Port, Bracket: T Bracket, Thread: M Thread, Rc(PT), Port Size: M5

Size: For AC1000, Bracket: T Bracket, Thread: M Thread, Rc(PT), Port Size: M5

Speed Controller with

2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: T (w/o Operation Manual, Calibration Certificate)